1550 nanometer wavelength silicon reflection type polarized beam splitting optical grating

Abstract

The invention provides a 1550nm wavelength silicon reflective polarization beam splitting raster. When the TM polarized light and TE polarized light are reflected respectively at level 0 and 1, the duty ratio of the raster is 0.5, the cycle of the raster is 344-412 nm, and the erosion depth is 1.076-1.205 micrometer, the extinction ratio of the polarization beam splitting raster is more than 100, and two lights with polarization modes vertical to each other can be divided to emit at different directions.

Description

technical field [0001] The invention relates to a polarization beam splitting grating, in particular to a silicon reflective polarization beam splitting grating with a wavelength of 1550 nanometers. Background technique [0002] In the field of optical communication, a polarization beam splitter is a key optical component, which can split light into two beams of polarized light whose polarization directions are perpendicular to each other. In most applications, people often need a polarization beam splitter with high extinction ratio, high diffraction efficiency, wide operable wavelength range and angular bandwidth, and small size. Traditional polarizing beam splitters are based on the natural birefringence effect of some crystals (such as Thomson prisms, Nicol prisms, and Wollaston prisms) or the polarization selectivity of multilayer dielectric films. However, polarizing beam splitters made of birefringent crystals are bulky and expensive; while thin-film polarizing beam ...

AI Technical Summary

Problems solved by technology

But as far as we know, so far, no one has given the design parameters of high-density deep-etched silicon reflective polarization beam-splitting grating for infrared light with a wavelength of 1550 nm.

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