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Electromagnetic levitation static driven micro-rotation gyro

A technology of electrostatic drive and electromagnetic levitation, which is applied in the field of gyroscopes in the field of micro-electromechanical technology, can solve the problems of high-precision micro-gyroscopes, and achieve the effect of increasing rotational torque and speed

Inactive Publication Date: 2006-07-19
SHANGHAI JIAO TONG UNIV
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

This speed is far from meeting the requirements of high-precision micro-gyro

Method used

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  • Electromagnetic levitation static driven micro-rotation gyro
  • Electromagnetic levitation static driven micro-rotation gyro
  • Electromagnetic levitation static driven micro-rotation gyro

Examples

Experimental program
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Embodiment Construction

[0013] Such as figure 1 As shown, the present invention includes: a rotating drive electrode 1, a micro-rotor 2, a stable levitation coil outer ring 3, a toothed electrode 4, a sensing electrode 5, a substrate 6, a stable levitation coil inner ring 7, and a connecting wire 8. The connection relationship is: the inner ring 7 of the stable suspension coil, the outer ring 3 of the stable suspension coil, the sensing electrode 5, and the rotating drive electrode 1 are all set on the base body 6, and form a fixed connection with the base body 6, and the micro-rotor 2 is suspended under the action of electromagnetic force On the top of the base 6, the micro-rotor 2 is in the shape of a ring, and tooth-shaped electrodes 4 are evenly distributed on the inner side of the ring. The rotating drive electrode 1 and the tooth-shaped electrodes 4 form a variable capacitor, and the inner ring 7 of the stable suspension coil and the outer ring of the stable suspension coil The rings 3 are conn...

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Abstract

The invention relates to an electromagnetic suspension static electricity driving micro-rotating gyrostat in the field of Micro Electro-Me-chanical Systems technique. It comprises: a rotation driving electrode, a micro-rotor, a stabilizing floating coil collar, a tooth outline electrode, a sensing electrode, a base body, a stabilizing floating coil inner ring and a connecting line, wherein the stabilizing floating coil collar, the stabilizing floating coil inner ring, the sensing electrode and the rotation driving electrode are fixed on the base body and forms to the fixed connection; the micro-rotor is positioned on the upper of the base body on the electromagnetic force effect; the micro-rotor is loop type with the tooth outline electrode, the rotation driving electrode and the tooth outline electrode distributed on the inner side of the loop to form the variable capacity; the stabilizing floating coil inner ring is connected with the stabilizing floating coil collar by connecting wire.

Description

technical field [0001] The invention relates to a gyroscope in the field of micro-electromechanical technology, in particular to an electromagnetic levitation electrostatically driven micro-rotating gyroscope. Background technique [0002] In the past two decades, many kinds of micro-vibration gyroscopes have been processed by using silicon surface micro-processing technology or bulk micro-processing technology at home and abroad, but it is difficult for micro-vibration gyroscopes to achieve the high precision of traditional gyroscopes due to various reasons. In the 1990s, Shearwood and others proposed an electromagnetic levitation micro-rotating gyroscope. The electromagnetic levitation micro-rotating gyroscope is composed of planar coils, induction electrodes and micro-rotors. The planar coils are divided into suspension coils according to their functions. , rotating coil and stable coil. The electromagnetic levitation micro-rotating gyroscope is suspended and rotated by ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01C19/24G01C19/08G01C19/02
Inventor 吴校生陈文元赵小林张卫平
Owner SHANGHAI JIAO TONG UNIV
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