The invention relates to the technical field of magnetron
sputtering, and particularly discloses a magnetron
sputtering silver-coated conductive material
powder device based on an ultrasonic-
electromagnetic suspension composite dispersion
system and application of the magnetron
sputtering silver-coated conductive material
powder device. In order to solve the technical problems of
powder agglomeration, low target material
utilization rate and poor large-scale production uniformity, a porous
ceramic tool plate is used as a core carrier, and a high-frequency ultrasonic vibrator array (adjustable in 20-100kHz), a planar rectangular
cathode (with an inclination angle of 0-15 degrees) and a
Helmholtz coil (0.1-0.5 T
rotating magnetic field) are integrated; non-contact dispersion of powder and precise
coating of a silver layer are achieved through the
cavitation effect,
electromagnetic suspension and multi-target cooperative sputtering. The tool disc adopts a gradient aperture design, and is combined with
liquid nitrogen micro-channel cooling and a modular sub-cavity structure, so that the powder dispersion uniformity (CV value lt; 5%), the silver layer
porosity (llt; 1%), the target material
utilization rate (52%) and the single-furnace productivity (72 kg / 8 h) are obviously optimized, and an efficient and environment-friendly industrialization solution is provided for the field of
electronic materials.