Calibrating method for laser self-collimation angle measuring system

A calibration method and self-collimation technology, applied in the field of measurement, can solve the problems of unsuitable dynamic measurement, long time consumption, large amount of calibration point data, etc.

Inactive Publication Date: 2006-11-15
BEIHANG UNIV
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  • Abstract
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Problems solved by technology

This calibration method requires a large amount of calibration point data, the calibration accuracy is difficult to guarantee, and it takes a long time in the process of looking up the table, so it is not suitable for real-time dynamic measurement

Method used

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  • Calibrating method for laser self-collimation angle measuring system
  • Calibrating method for laser self-collimation angle measuring system
  • Calibrating method for laser self-collimation angle measuring system

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Embodiment

[0053] figure 1 The laser autocollimation three-degree-of-freedom dynamic angle measurement system mainly consists of the following physical equipment: ① A three-degree-of-freedom rotary table with an accuracy of arc-second level, and a plane reflector is placed at the rotation center of the rotary table. ②Laser angle measurement sensing part, that is, the optical part of the angle measurement system, has a measurement range of ±1° and a focal length of f=168.44mm. The distance from the optical system to the measured object is L=1.2m. ③ The photoelectric receiving device is a two-dimensional pillow type position sensitive detector PSD produced by Hamamatsu Corporation of Japan, the model is S1880. ④ Data acquisition and display part: mainly composed of data acquisition card, computer and so on.

[0054] Acquisition of calibration data pairs.

[0055] The object to be measured is installed on a precision three-axis rotary table, and a reflector is attached to the surface of ...

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Abstract

The present invention belongs to the field of measurement technology, and relates to an improvement on calibration method for laser autocollimating angle-measuring system. It is characterized by that on the basis of laser autocollimating three-freedom dynamic angle measuring system said invention adopts the following steps: creating simplified calibration model of laser autocollimating angle measuring system, obtaining rating data pair, calibrating parameter of model and obtaining measurement model of system.

Description

technical field [0001] The invention belongs to the measurement technology and relates to the improvement of a calibration method for a laser self-collimation angle measurement system. Background technique [0002] Since the appearance of laser self-collimation angle measurement technology in the 1960s, it has become an increasingly important small-angle precision testing technology. It has unique advantages in realizing small-angle multi-dimensional and non-contact measurement. The angle measurement system developed based on this technology It has the characteristics of high sensitivity, simple structure, convenient use, and can realize static and dynamic measurement of two-dimensional angles. After any laser autocollimation angle measurement system is built, it needs to go through a calibration process to determine the exact value of the unknown parameters in the system measurement model, and then the system can perform its functions correctly. The effective calibration m...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01B11/26G01B21/22
Inventor 张广军江洁尚鸿雁
Owner BEIHANG UNIV
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