Basal lamina determination device
A technology for measuring devices and substrates, applied in measuring devices, optical testing of flaws/defects, material analysis through optical means, etc., can solve problems such as adjusting the deformation of the shooting mechanism, display device and workbench, to prevent dumping and support easily , the effect of stabilizing support
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[0031] Hereinafter, embodiments of the present invention will be described based on the drawings. figure 1 It is a front view of the length gauge as the substrate measuring device according to the present invention, figure 2 Is its side view, image 3 It is its top view. In addition, in image 3 Only the main parts of the first supporting member 11 and the stage portion 15 are shown in the, and other members are omitted.
[0032] The length measuring instrument has: a base 10 composed of a first support member 11, a second support member 12, and a base member 13; a stage portion 14 supported by the base 10; along the surface of the stage portion 14 A gantry 15 that can move in the left-right direction; an imaging unit 18 that is composed of a photographing unit 16 and a moving member 17 that are connected to each other and can move in the up-and-down direction along the gantry 15.
[0033] In addition, in this manual, as from Figure 1 to Figure 3 As shown, a three-dimensional c...
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