Light wave interferometer
A technology of light waves and light beams, applied in the direction of using optical devices, measuring devices, testing optical properties, etc., can solve the problems of time-consuming, difficult replacement of the tested lens 100, and complicated and large-scale devices, so as to achieve the effect of the device
Inactive Publication Date: 2010-09-15
FUJI PHOTO OPTICAL CO LTD
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Problems solved by technology
[0014] However, as described above, when the lens to be inspected 100 is securely fixed to the lens mounting jig 104, it is extremely difficult to replace the lens to be inspected 100 by automated work using a robot or the like.
[0015] In manufacturing processes such as optical pickup lenses, it is imperative to establish a system that can mass-produce lenses at high speed, but currently, as described above, part of the optical interferometry operation for inspecting the wavefront aberration of the lens 100 to be inspected requires time and manual work. For operation, there is a strong demand for fully automated optical interferometry of the inspected lens
[0016] In addition, according to the technology described in the above publication, in addition to the configuration of the commonly used interferometer device, the above-mentioned condenser lens and line sensor, as well as the one-way glass for dividing the optical path in the direction of the condenser lens, etc., are required, resulting in a complicate, enlarge
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[0084] Hereinafter, embodiments of the present invention will be described with reference to the drawings. figure 1 It is a diagram schematically showing the configuration of main parts of an optical wave interference device according to an embodiment of the present invention. figure 2 is a schematic diagram showing the shape of the lens to be inspected ((A) is a front view, (B) is a plan view), image 3 It is a schematic diagram showing the shape of the peripheral surface support table of the lens mounting jig, Figure 4 It is a front view showing the general structure of the detected lens positioning part of the optical wave interference device of this embodiment, Figure 5 It is a side view showing the general configuration of the detected lens positioning unit for showing the loaded / unloaded state of the detected lens of the optical wave interference device according to the present embodiment.
[0085] Such as figure 1 As shown, the optical wave interference device o...
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To provide a light wave interference device, capable of adjusting automatically parallel deviation between the optical axis of an inspection lens and the optical axis of a reference spherical reflecting mirror, and automating light wave interference measurement of the inspection lens, in the light wave interference device equipped with a positioning means of the inspection lens. A bright spot, based on reflected light of measuring light flux from the surface of the inspection lens (1), is observed, and the image position of the bright spot on an observation screen is operated, and a moving amount of the reference spherical reflecting mirror (7) required for moving the measured bright point image to a prescribed reference position on the observation screen is calculated. Driving the control of the reference spherical reflecting mirror (7) is performed based on the operated moving amount, and thereby the deviation in parallelism between the optical axis of the inspection lens (1) and the optical axis of the reference spherical reflecting mirror (7) is adjusted automatically on the observation screen for the light wave interference measurement.
Description
technical field [0001] The present invention relates to a light wave interference device for measuring a transmitted wavefront provided with a positioning device for a lens to be detected, and particularly relates to the measurement of wavefront aberrations such as an optical pickup lens mounted on a recording / reproducing device for an optical recording medium. A light wave interference device that automatically adjusts the offset between the optical axis of the tested lens and the optical axis of the reference spherical mirror. Background technique [0002] Conventionally, there are known optical wave interferometers for measuring the wavefront aberration of various lenses, for example, optical pickup lenses and the like, for measuring the transmitted wavefront. [0003] In such a light wave interference device, the lens-to-be-tested mounting jig is moved in a direction approximately perpendicular to the optical axis direction of the lens-to-be-tested supported by the jig, ...
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IPC IPC(8): G01B9/02G01M11/02
Inventor 植木伸明
Owner FUJI PHOTO OPTICAL CO LTD