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Ultrasonic probe and method for the fabrication thereof

A technology of ultrasonic probe and piezoelectric element, applied in ultrasonic/sonic/infrasonic diagnosis, sonic diagnosis, infrasonic diagnosis, etc., can solve the problem of low performance, complex manufacturing process of epoxy resin paste layer and flexible printed circuit board, ultrasonic probe performance deterioration, etc.

Active Publication Date: 2007-04-25
HUMANSCAN
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, the insertion of the epoxy paste layer easily degrades the performance of the ultrasound probe, and the connection of the epoxy paste layer to the flexible printed circuit board (FPCB) requires complicated manufacturing procedures
Although silver epoxy pastes, which have better conductivity than non-silver epoxy pastes, have been used in an attempt to reduce the thickness of the epoxy paste layer, the aforementioned low performance issues have not been resolved

Method used

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  • Ultrasonic probe and method for the fabrication thereof
  • Ultrasonic probe and method for the fabrication thereof
  • Ultrasonic probe and method for the fabrication thereof

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Experimental program
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Embodiment

[0055] The ultrasound probe shown in FIG. 1 according to the present invention is manufactured by a method including the steps shown in FIGS. 2 and 3 .

[0056] Prepare a piezoelectric single crystal substrate 10 having a (001) plane (surface 10a) and a size of 20-25mm×15-20mm×0.4-0.5mm, and at room temperature and 1.2×10 -7 A metal layer (Cr / Cu / Au) 20" was deposited on the substrate surfaces 10a, 10b, 10c and 10d (but not surfaces 10e and 10f) by DC sputtering at mmHg pressure (Figs. 2a and 2b).

[0057] Next, two grooves 30 and 30' are respectively formed on the surfaces 10a and 10b of the metal-deposited piezoelectric single crystal substrate using a dicing machine, thereby separating the metal layer 20" into two electrodes 20 and 20': The groove 30 is formed on the electrode layer 20a' deposited on the surface 10a parallel to the edge formed with the surface 10d and at a distance of 1-1.5 mm from said edge, while the groove 30' is formed on the electrode deposited on the s...

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Abstract

An ultrasonic probe comprising a piezoelectric element, a first electrode formed on a substantial portion of a first main face, a first side face and a part of a second main face of the piezoelectric element, and a second electrode formed on a substantial portion of a second main face, a second side face and a part of a first main face of the piezoelectric element, the two electrodes being isolated from each other by two grooves formed on the first and second main faces of the piezoelectric element, in a manner parallel to the side edges of the piezoelectric element, respectively, has good vibration and probing properties.

Description

technical field [0001] The present invention relates to ultrasound probes with uniquely designed electrodes and methods of making the same. Background technique [0002] Ultrasound imaging devices have been widely used, and conventionally include an ultrasound probe that converts ultrasound waves into electrical signals, a processing unit that processes the electrical signals into images, and a display unit that displays the images. Ultrasound probes play an important role in obtaining high-resolution images. Ultrasonic probes need to have high electromechanical coupling coefficients and good focusing characteristics of ultrasonic pulses and ultrasonic beams. [0003] Ultrasonic probes usually include ultrasonic transmitting / receiving elements, which are mainly composed of piezoelectric elements with a pair of electrodes. Lead zirconate titanate-based ceramics (PZT) were used as piezoelectric elements in the past, but recently lead niobate zincate-titanate Lead (Pb(Zn 1 / 3 ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): A61B8/00B06B1/06
CPCB06B1/0677B06B1/0685
Inventor 李相救林圣珉郑虎金世勋
Owner HUMANSCAN