Method and device for detecting arcs
An arc and arc detection technology, applied in the direction of measuring electrical variables, testing dielectric strength, measuring current/voltage, etc.
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[0035]FIG. 1 shows an arc detection device 1 . An evaluation signal is applied to the input 2, either from an AC generator or from a direct measurement at the electrodes of the plasma process chamber. The evaluation signal can be, for example, an AC voltage generated by an AC generator, or an internal signal of the AC voltage generator. In the present embodiment, this signal is applied to one input of each analog-to-digital converter (ADC) 3, 4, 5, 6, 25, said ADC being designed as a comparator. The evaluation signal is also supplied to a peak rectifier 7 comprising a diode 8 , a resistor 9 and a capacitor 10 . In the peak rectifier 7 the amplitude UA is determined, which is an average of several cycles of the evaluation signal. In this embodiment, the voltage is determined. The voltage is applied to a reference value generating device 11 designed as a voltage divider. The resistors 12, 13, 14, 15 of the reference value generating device 11 are of equal size. This means t...
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Abstract
Description
Claims
Application Information
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