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The real-time control system and control method for the ion source in gas

A technology of real-time control system and ion source, applied in the field of high-energy ion beam, can solve the problems of uneven distribution of arc ion density, inability to accurately reflect the stability, affecting the quality of beam extraction, etc., and achieve steady and uniform plasma density , Improve ease of maintenance, the effect of long-pulse operation

Active Publication Date: 2010-05-26
武汉中科光谷绿色生物技术有限公司
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Problems solved by technology

This method has the following disadvantages: firstly, using the loop current of the arc power supply as a feedback signal cannot accurately reflect the stability of the ion current density of the ion source, so the obtained arc current ion density may be unevenly distributed, which affects the quality of the beam extraction; secondly , the design of the arc power source applied by this method is more complicated, the production investment is large in the application process, and the maintenance is difficult

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  • The real-time control system and control method for the ion source in gas
  • The real-time control system and control method for the ion source in gas
  • The real-time control system and control method for the ion source in gas

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Embodiment Construction

[0015] The system of the invention is composed of three parts, which are divided into feedback signal generation and transmission, signal processing and control, and control transmission and execution. The feedback signal generation and transmission part is composed of an ion saturation current sensor (12), a sampling circuit (25) and a signal isolation amplifier circuit (26); the signal processing and control part is composed of an A / D acquisition module (33), a network module (32) , D / A output module (31) and system controller (30); the control transmission and execution part is composed of VF converter (24), optical fiber (23), FV converter (22), air valve power drive module (21 ) and a controllable air valve (10). Feedback signal generation and transmission part will feedback signal V f (40) is transmitted to the system controller (30), and the system controller (30) sends the feedback signal V f (40) with the reference signal V ref (42) processing, according to process...

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Abstract

This invention discloses one ion source real-time control system and its control method, wherein, the system comprises three parts of feedback signal generation and transmission part, signal process and control part and transmission control and execution part, wherein, the ion saturation sensor is extended into ion source with control gas valve fixed by side of ion source; according the ion saturation flow signal and gas in volume of ion source to recede difference value to control gas valve ends voltages to make the arc flow near parameter values.

Description

technical field [0001] The invention relates to the field of high-energy ion beams, in particular to plasma generation of an ion source and real-time control of an air intake system. Background technique [0002] An ion source is a device that produces a beam of high energy ions. It is the core component of various particle injection accelerators and the key component of the beam source of the neutral beam injector. Whether it is an ion beam implanter or a neutral beam implanter, the ion source should provide a stable and high-quality ion beam to be used in various ion beam extraction situations. [0003] In the plasma arcing discharge process of the ion source, if constant voltage, constant current and stable air intake conditions are used, the arc power supply will be overloaded in a short time, resulting in power overcurrent protection or plasma instability and even rupture. At present, the technology used to control the arcing current of the ion source is mainly: use ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01J37/08H01J37/04H01J37/00H01J27/02H05H1/00
Inventor 胡纯栋刘胜盛鹏宋士花刘智民王绍虎
Owner 武汉中科光谷绿色生物技术有限公司
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