High density SRAM cell with latched vertical transistors
a vertical transistor and high density technology, applied in semiconductor devices, digital storage, instruments, etc., can solve the problems of loss of data, increased process complexity, and static memory cells utilizing both n-channel and p-channel devices (cmos srams) are exceptionally large cell areas, so as to achieve minimal masking steps and process complexity. the effect of minimal
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[0032] In the following detailed description, reference is made to the accompanying drawings which form a part hereof, and in which is shown by way of illustration specific embodiments in which the invention may be practiced. These embodiments are described in sufficient detail to enable those skilled in the art to practice the invention, and it is to be understood that other embodiments may be utilized and that structural, logical and electrical changes may be made without departing from the spirit and scope of the present invention.
[0033] The terms wafer or substrate used in the following description include any semiconductor-based structure having an exposed silicon surface in which to form the structure of this invention. Wafer and substrate are to be understood as including doped and undoped semiconductors, epitaxial layers of silicon supported by a base semiconductor foundation, and other semiconductor structures. Furthermore, when reference is made to a wafer or substrate in...
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