A magnetic device for magnetic
random access memory (MRAM), spin torque MRAM, or spin torque oscillator technology is disclosed wherein a magnetic
tunnel junction (MTJ) with a sidewall is formed between a bottom
electrode and a top
electrode. A
passivation layer that is a single layer or multilayer comprising one of B, C, or Ge, or an
alloy thereof wherein the B, C, and Ge content, respectively, is at least 10 atomic % is formed on the MTJ sidewall to protect the MTJ from reactive species during subsequent
processing including deposition of a
dielectric layer that electrically isolates the MTJ from adjacent MTJs, and during annealing steps around 400° C. in
CMOS fabrication. The single layer is about 3 to 10 Angstroms thick and may be an
oxide or
nitride of B, C, or Ge. The
passivation layer is preferably amorphous to prevent
diffusion of reactive
oxygen or
nitrogen species.