Scrubbing device and roll sponge assembly used therein
Patent Information
- Authority / Receiving Office
- US · United States
- Current Assignee / Owner
- FUJI ELECTRIC DEVICE TECH CO
- Publication Date
- 2008-11-13
- Estimated Expiration
- Not applicable · inactive patent
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Abstract
Description
BACKGROUND OF THE INVENTION AND RELATED ART STATEMENT
[0001] The present invention relates to a scrubbing device for cleaning a circular or a rectangular plate such as a magnetic disc substrate made of metal, glass or the like, a semiconductor wafer, and so on, and a roll sponge assembly used in the scrubbing device.
[0002] In recent years, magnetic disk drives have become smaller in size and expanded their range of applications, while it has been always demanded to further increase a recording density of a magnetic disc installed in the drive. A magnetic disk is manufactured by forming thin films such as a magnetic layer on a substrate made of glass or a metal such as aluminum. With regard to this type of magnetic disk, major progress has been made, in response to the demands described above, for the development of a substrate capable of reducing the distance (magnetic spacing) between a magnetic head and the magnetic disk. As disclosed in Patent Document 1: Japanese Unexamined Patent ...