Looking for breakthrough ideas for innovation challenges? Try Patsnap Eureka!

Temperature control device

a temperature control device and temperature technology, applied in the direction of temperature control using electric means, indirect heat exchangers, lighting and heating apparatus, etc., can solve the problems of inability to quickly change the temperature inside the temperature adjustment unit is not easy to change, etc., to achieve the effect of reducing the amount of work and quick placemen

Inactive Publication Date: 2008-12-25
TOKYO ELECTRON LTD +1
View PDF7 Cites 26 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Benefits of technology

[0007]An object of the present invention is to provide a temperature control device that can, when controlling the temperature of a controlled object by circulating a fluid in a temperature adjustment unit arranged near the controlled object, quickly achieve the desired temperature of the controlled object.
[0039]When the supply of fluid from the heating pathway and the cooling pathway to the temperature adjustment unit is prohibited, a temperature gradient will be created between the downstream side of the adjustment means and the prohibited pathway. Thus, due to the effects of the temperature gradient in the fluid to be supplied to the temperature adjustment unit immediately after the prohibition is eliminated, a longer period of time may be needed for the temperature of the temperature adjustment unit to achieve the desired temperature. When the temperature of the temperature adjustment unit is in a steady state, means 14 can suitably inhibit temperature gradients, and can more quickly place the temperature of the temperature adjustment unit at the desired temperature, by prohibiting the path dimensions adjusted by the adjustment means of the heating pathway and the cooling pathway from reaching zero.

Problems solved by technology

The aforementioned temperature control device requires a long period of time in order to change to the desired temperature of a controlled object.
Because of this, the temperature inside the temperature adjustment unit 106 cannot be quickly changed, and thus the temperature of the controlled object cannot be quickly changed.

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Temperature control device
  • Temperature control device
  • Temperature control device

Examples

Experimental program
Comparison scheme
Effect test

first embodiment

[0054]A first embodiment of the temperature control device according to the present invention will be described below with reference to the drawings.

[0055]FIG. 1 shows the overall construction of the temperature control device according to the present embodiment.

[0056]The illustrated temperature control device is employed in, for example, processes / manufacturing steps in the bioengineering field and the chemical engineering field, bioengineering / chemical experimentation, semiconductor manufacturing processes, manufacturing processes for precision machinery. The temperature control device comprises a temperature adjustment plate 10. The temperature adjustment plate 10 is a plate shaped member that is capable of supporting a controlled object from below by mounting the controlled object on top thereof, and exchanges heat energy with the controlled object. More specifically, a pathway (temperature adjustment unit 11) is provided in the interior of the temperature adjustment plate 10, a...

second embodiment

[0109]A second embodiment will be described below with reference to the drawings that are focused on the points that differ from the first embodiment.

[0110]FIG. 8 shows the overall construction of the temperature control device according to the present embodiment. As shown in FIG. 8, in the present embodiment, a effusion pathway 60 that effuses the fluid inside the cooling pathway 20 to the discharge pathway 14 is connected between the cooling temperature sensor 26 and the cooling valve 24 along the cooling pathway 20. In addition, a effusion pathway 62 that effuses the fluid inside the heating pathway 40 to the discharge pathway 14 is connected between the heating temperature sensor 46 and the heating valve 44 along the heating pathway 40.

[0111]These effusion pathways 60 and 62 are sufficiently smaller than the path dimensions of either of the cooling pathway 20 and the heating pathway 40. This is in order to allow a minute amount of fluid to be effused from the cooling pathway 20 ...

third embodiment

[0116]A third embodiment will be described below with reference to the drawings that are focused on the points that differ from the first embodiment.

[0117]FIG. 9 shows the relationship between the basic manipulating variable MB according to the present embodiment and the ratio of opening Va, Vb and Vc of the cooling valve 24, the bypass valve 34, and the heating valve 44. As shown in FIG. 9, in the present embodiment, the ratio of opening Va of the cooling valve 24 and the ratio of opening Vc of the heating valve 44 are set so as not to be in a completely closed state. In other words, the ratio of opening Va of the cooling valve 24 will monotonically decrease in accordance with an increase in the basic manipulating variable MB when the basic manipulating variable MB is less than zero, and will be at the minimum ratio (>0) when the basic manipulating variable MB is zero or more. In addition, the ratio of opening Vc of the heating valve 44 will monotonically increase in accordance wit...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

PUM

No PUM Login to View More

Abstract

A temperature control device controls the temperature of a controlled object by circulating a fluid in a temperature adjustment unit arranged near the controlled object. The temperature control device comprises a heating pathway that heats and circulates the fluid in the temperature adjustment unit, a cooling pathway that cools and circulates the fluid in the temperature adjustment unit, a bypass pathway that does not pass the fluid through the heating pathway and cooling pathway, but circulates the fluid in the temperature adjustment unit, and adjustment means that adjust a flow ratio of the fluid that is supplied from the heating pathway, cooling pathway, and bypass pathway to the temperature adjustment unit via a confluence unit that combines these flows. The adjustment means are provided on a downstream side of each of the heating pathway, the cooling pathway, and the bypass pathway and on the upstream side of the confluence unit.

Description

FIELD OF THE INVENTION[0001]The present invention relates to a temperature control device that controls the temperature of a controlled object by circulating a fluid in a temperature adjustment unit arranged near the controlled object.BACKGROUND ART[0002]FIG. 12 shows this type of temperature control device. Fluid inside a storage tank 100 is drawn by a pump 102, and is discharged to a heating unit 104. The heating unit 104 is comprised of a heater, and is capable of heating the fluid to be supplied to a temperature adjustment unit 106. The fluid that has passed through the temperature adjustment unit 106 will be supplied to a cooling unit 108. The cooling unit 108 is capable of cooling the fluid to be discharged to the storage tank 100.[0003]The temperature adjustment unit 106 is capable of supporting a controlled object, and the temperature of the controlled object that is supported by the temperature adjustment unit 106 will be controlled by adjusting the temperature of the fluid...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

Application Information

Patent Timeline
no application Login to View More
IPC IPC(8): F28D15/00
CPCG05D23/19G05D23/02
Inventor NAGASEKI, KAZUYAKOBAYASHI, YOSHIYUKIMURAKAMI, KOICHINONAKA, RYOSUDOH, YOSHIHISAITAFUJI, HIROSHIKOKUBO, NORIO
Owner TOKYO ELECTRON LTD
Who we serve
  • R&D Engineer
  • R&D Manager
  • IP Professional
Why Patsnap Eureka
  • Industry Leading Data Capabilities
  • Powerful AI technology
  • Patent DNA Extraction
Social media
Patsnap Eureka Blog
Learn More
PatSnap group products

Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic, Popular Technical Reports.

© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap|About US| Contact US: help@patsnap.com