Air ventilation system

Abstract

The present invention is directed at an air ventilation system for use with semiconductor manufacturing equipment. Specifically, the ventilation system of the present invention adjusts vents or outlets located on an enclosure used for semiconductor manufacturing between a restricted state and an open state. When the vents and / or outlets are in an open state, a high flow rate through the enclosure is able to properly scavenge toxic and volatile gasses to safely remove them. When the vents and / or outlets are in a restricted state, the flow rate of gases therethrough is substantially or fully restricted. Upon the sensing of a condition (or the lack thereof) or the manual operation of an operator, the vents and / or outlets are selectively adjusted between the restricted and open states.

Description

FIELD OF INVENTION[0001]The invention relates to an automated air ventilation system for use with enclosures such as those used in semiconductor manufacturing and processing. More particularly, the device of the present invention comprises an automated ventilation system that enables an enclosure to only have the maximum flow rate when desired, for example, based on the presence or absence of one or more conditions that require a high flow rate.BACKGROUND OF THE INVENTION[0002]Semiconductor manufacturing requires numerous gasses that are highly explosive, toxic, corrosive, or otherwise harmful. These gasses are typically found in numerous machines and processing tools that include enclosures that are used (in part) to prevent the gasses from escaping into the immediate working environment and causing harm. Allowing these gasses to build up within the enclosures can lead to explosions and releases of the toxic gasses into the surrounding environment.[0003]To prevent gas buildup withi...

AI Technical Summary

Benefits of technology

[0007]As set forth in the detailed description and accompanying figures, the present invention comprises, in various exemplary embodiments, a device configured to overcome a typical ventilation system's shortcomings by providing a system and device that adjusts the air flow within an enclosure used for semiconductor manufacturing based upon the occurrence of one or more conditions. As a result, the ventilation system of the present invention reduces the cost to operate semiconductor manufacturing equipment because of the reduced amount of conditioned air that is consumed.

Problems solved by technology

Semiconductor manufacturing requires numerous gasses that are highly explosive, toxic, corrosive, or otherwise harmful.

Allowing these gasses to build up within the enclosures can lead to explosions and releases of the toxic gasses into the surrounding environment.

Maintaining a high flow rate can be expensive as the air used must generally be conditioned for temperature, humidity, particles, and other factors that are typically required in the manufacture of semiconductors.

Such conditioning is costly and can exceed tens of thousands of dollars per machine on an annual basis.

Because current semiconductor manufacturing tools utilize a high flow rate the entire time they operate regardless of whether such a high flow rate is actually needed, these tools consume a tremendous amount of energy and money.

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