System, method and apparatus for macroscopic inspection of reflective specimens
a macroscopic inspection and specimen technology, applied in the field of macroscopic inspection systems, apparatus and methods for imaging reflective specimens, can solve the problems of undesirable imaging artifacts, reflection of imaging devices, and/or illumination hot spots
Active Publication Date: 2021-02-11
NANOTRONICS IMAGING
View PDF0 Cites 6 Cited by
- Summary
- Abstract
- Description
- Claims
- Application Information
AI Technical Summary
Benefits of technology
The patent describes an inspection apparatus that can capture images of a specimen and stitch them together to create a composite image that eliminates the effects of imaging artifacts. The apparatus includes a specimen stage and imaging devices that can move to different positions to capture images from different angles. The method includes identifying a reference point on the specimen, capturing two images of the specimen, cropping the images to remove the imaging artifacts, and stitching the two images together to create a composite image. The composite image is useful for inspecting the specimen.
Problems solved by technology
These imaging artifacts (i.e., the reflection of the imaging device and / or the illumination hot spots) are undesirable.
Method used
the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View moreImage
Smart Image Click on the blue labels to locate them in the text.
Smart ImageViewing Examples
Examples
Experimental program
Comparison scheme
Effect test
Embodiment Construction
[0059]In accordance with some embodiments of the disclosed subject matter, mechanisms (which can include systems, methods, devices, apparatuses, etc.) for macroscopic examination of reflective specimens are provided. Macroscopic examination (sometimes referred to as inspection) refers to scanning, imaging, analyzing, measuring and any other suitable review of a specimen using the disclosed macroscopic inspection mechanism. The disclosed macroscopic inspection mechanism includes one or more modes of illumination that can each provide variable illumination landscapes, as described herein. Although the following description refers to components and methods implemented in a macroscopic inspection mechanism, the components and methods described herein can also be implemented in a microscope inspection system.
[0060]FIG. 2 illustrates an example of a macroscopic (macro) inspection system 100 according to some embodiments of the disclosed subject matter. At a high level, the basic component...
the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More PUM
Login to View More Abstract
An inspection apparatus includes a specimen stage, one or more imaging devices and a set of lights, all controllable by a control system. By translating or rotating the one or more imaging devices or specimen stage, the inspection apparatus can capture a first image of the specimen that includes a first imaging artifact to a first side of a reference point and then capture a second image of the specimen that includes a second imaging artifact to a second side of the reference point. The first and second imaging artifacts can be cropped from the first image and the second image respectively, and the first image and the second image can be digitally stitched together to generate a composite image of the specimen that lacks the first and second imaging artifacts.
Description
CROSS-REFERENCE TO RELATED APPLICATIONS[0001]This application claims the benefit of, and priority to, U.S. Provisional Application No. 62 / 883,931, filed Aug. 7, 2019, entitled “METHOD FOR IMAGING LARGE, REFLECTIVE SPECIMENS,” the contents of which are incorporated by reference in their entirety. This application is further related to U.S. patent application Ser. No. 16 / 262,017, filed Jan. 30, 2019, entitled “MACRO INSPECTION SYSTEMS, APPARATUS AND METHODS,” the contents of which are incorporated by reference in their entirety.TECHNICAL FIELD[0002]The present disclosure generally relates to macroscopic inspection systems, apparatus and methods for imaging reflective specimens.BACKGROUND OF THE INVENTION[0003]When performing macroscopic examination of a specimen (i.e., imaging, in a single field of view, a specimen, or an area of a specimen 200 mm or greater) that is made of reflective material (e.g., glass, mirror, optical lenses, semiconductor wafers, etc.): (1) the reflection of an...
Claims
the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More Application Information
Patent Timeline
Login to View More Patent Type & Authority Applications(United States)
IPC IPC(8): G06T5/00G06T7/00G06T5/50H04N5/247H04N5/225H04N5/232H04N23/90
CPCG06T5/002G06T7/0002G06T5/50H04N5/247G06T2207/10056H04N5/23299G06T2207/30168G06T2207/20221H04N5/2256G06T2207/30024H04N5/2628H04N23/50H04N23/90H04N23/74H04N23/617G06V10/145G06V10/24G06V10/147G06V2201/06G01N21/8806G01N21/8851G02B21/06G02B21/361G02B21/367G06T5/77H04N23/80G01N2021/8812G01N2021/8887G01N2201/104H04N23/56G06T5/70H04N23/695
Inventor PUTMAN, MATTHEW C.PUTMAN, JOHN B.MOFFITT, JOHNMOSKIE, MICHAELANDRESEN, JEFFREYPOZZI-LOYOLA, SCOTTORLANDO, JULIE
Owner NANOTRONICS IMAGING