Method of efficiently converting-to-array and compressing data in a process for converting mask patterns of a LSI

Abstract

In the method of converting-to-array according to the present invention, array configuration data is created by classifying the patterns congruent with a master pattern, which is a reference graphic for repetition, in the patterns arranged as mask patterns of a LSI, so that the number of the repetitions of the congruent pattern is the largest one when the congruent pattern is arranged repeatedly with a predetermined repetition pitch.

Description

BACKGROUND OF THE INVENTION[0001]1. Field of the Invention[0002]The present invention relates to a process for converting design data of repeated electronic circuits such as mask patterns of a LSI, and particularly to a process for converting mask data to arrays.[0003]2. Description of the Related Art[0004]In an integrated circuit (IC) or a large-scale integrated circuit (LSI), high density mounting of circuits is possible because of the regularity of circuit patterns, and large amount of design data is required accordingly. For this reason, it is a typical in an LSI, etc., because of the regularity of circuit patterns, that object data is compressed to a practical amount of data and then evaluations such as a logical simulation, a circuit simulation, or a design data check are performed.[0005]For example, a process for manufacturing semi-conductor wafers includes a process for converting circuit patterns to CAM data for a photomask in order to create the photomask. In particular, s...

AI Technical Summary

Benefits of technology

[0013]In the conversion-to-array process according to the present invention, since the repetition pitch in case of the maximum number of the repetitions may be selected from a plurality of predetermined candidates of the repetition pitch, the repetition pitch may be optimized, and, consequently, the data may be compressed efficiently compared with the conventional method.

Problems solved by technology

However, a useful result about the compression rate of data is not always obtained.

In particular, in case that intervals between upper and lower graphics and between right and left graphics adjacent each other are not even, the number of arrays created is large, and thereby sufficient data compression may not be achieved.

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