Controller for actuating a micromechanical actuator, actuating system for actuating a micromechanical actuator, micro-mirror system and method for actuating a micromechanical actuator

Abstract

A controller for actuating a micromechanical actuator, including a first signal input which is designed to receive a reference signal, a second signal input which is designed to receive a measuring signal which denotes a recorded response by the micromechanical actuator to a control signal, a first controller element which is designed to filter and / or to attenuate predefined frequency modes and / or predefined frequency components in the received reference signal and to output a filtered and / or attenuated reference signal, a second controller element which is designed to modify the received measuring signal in order to minimize the quality of the first mode of the received measuring signal and to output a modified measuring signal, a third controller element which is designed to minimize the deviation between the filtered and / or attenuated reference signal and the received measuring signal and to output a minimized reference signal, a fourth controller element which is designed to modify the bandwidth of the received measuring signal and to subtract it from the minimized reference signal, which makes up the control signal. Furthermore, a corresponding actuating system, a corresponding micro-mirror system and a corresponding method are described.

Description

FIELD OF THE INVENTION[0001]The present invention relates to a controller for actuating a micromechanical actuator, to an actuating system for actuating a micromechanical actuator, to a micro-mirror system and to a method for actuating a micromechanical actuator.BACKGROUND INFORMATION[0002]Micromechanical actuators are used in a plurality of applications today. For example, micro-mirrors are utilized in projector units which are to be set up in a very small installation space.[0003]In such projector units, micro-mirrors are usually utilized which represent a so-called MEMS, i.e., micro electro mechanical system. These types of MEMS mirrors often have several mechanical resonance points which may be correspondingly electrically excited and which are also known as modes or poles in the transfer function. Furthermore, such MEMS mirrors also have anti-resonance modes which are also known as zero points in the transfer function or notch.[0004]The modes of the MEMS mirrors are subdivided ...

AI Technical Summary

Benefits of technology

[0025]A method for actuating a micromechanical actuator in a closed loop circuit including the steps of receiving a reference signal, receiving a measuring signal which denotes a recorded response by the micromechanical actuator to a control signal, filtering and / or attenuating predefined frequency modes and / or predefined frequency components in the reference signal, modifying the received measuring signal to minimize the quality of the first mode and / or further modes of the closed loop circuit, minimizing the deviation between the filtered and / or attenuated reference signal and outputting a minimized reference signal, adapting the bandwidth of the closed loop circuit by adapting the received measuring signal, for transmitting as the control signal to the micromechanical actuator the sum from the minimized reference signal and the modified measuring signal and the adapted measuring signal.

[0041]In one specific embodiment, the first controller element is designed as a digital filter element, in particular as an IIR filter element and / or a notch filter element and / or an FIR filter element. This makes a very simple implementation with little complexity of the first controller element and a very flexible adaptability of the first controller element possible.

Problems solved by technology

In particular, the excitation of spurious modes has a negative impact on the quality of the image projected.

All controllers used have in common that they need a very large system bandwidth and thus require a very high amount of computing power.

Furthermore, some of the known controller concepts require additional status information of the MEMS mirror which may actually only be determined with great difficulty or which is very difficult to estimate.

Large system bandwidth and high computing power mean a large space requirement in the IC control integrated circuits, for example, for analog-digital converters, microcontrollers, digital-analog converters, driver stages and the like.

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