Thin film transistor array panel

Abstract

A thin-film transistor array panel includes an insulation substrate, a gate line disposed on the insulation substrate, a gate insulating layer disposed on the gate line, a semiconductor layer disposed on the gate insulating layer, a data line disposed on the semiconductor layer and including a source electrode, a drain electrode disposed on the semiconductor layer and facing the source electrode, a first electrode disposed on the gate insulating layer, a first passivation layer disposed on the first electrode and including silicon nitride, a second passivation layer disposed on the first passivation and including silicon nitride, and a second electrode disposed on the passivation layer, in which a first ratio of nitrogen-hydrogen bonds to silicon-hydrogen bonds in the first passivation layer is different from a second ratio of nitrogen-hydrogen bonds to silicon-hydrogen bonds in the second passivation layer.

Description

CROSS-REFERENCE TO RELATED APPLICATION[0001]This application claims priority from and the benefit of Korean Patent Application No. 10-2015-0006322, filed on Jan. 13, 2015, which is hereby incorporated by reference for all purposes as if fully set forth herein.BACKGROUND[0002]1. Field[0003]Exemplary embodiments of the present invention relate to a thin-film transistor array panel including passivation layers.[0004]2. Discussion of the Background[0005]A liquid crystal display is one of flat panel displays that may include two display panels in which electric field generating electrodes, such as a pixel electrode and a common electrode, are disposed, and a liquid crystal layer disposed between the two display panels. An image may be displayed in a liquid crystal display by applying a voltage to the electric field generating electrodes to generate an electric field, determining alignment of liquid crystal molecules, and controlling polarization of incident light.[0006]The liquid crystal...

AI Technical Summary

Benefits of technology

[0009]Exemplary embodiments of the present invention provide a thin-film transistor array panel used for a liquid crystal display in which two field generating electrodes are formed in a single substrate, to prevent generation of arcing during deposition of a passivation layer.

[0031]According to exemplary embodiments of the present invention, a first and second passivation layers having different ratios of nitrogen-hydrogen bonds (N—H) to silicon-hydrogen bonds (Si—H) may be disposed in a dual structure, and the first passivation layer may have the ratio of nitrogen-hydrogen bonds (N—H) to silicon-hydrogen bonds (Si—H) in a range of 22 to 24, to prevent occurrence of arcing during a process of forming the passivation layer, and thereby preventing a damage to a substrate.

[0032]According to exemplary embodiments of the present invention, a thin-film transistor array panel may improve transmittance from the passivation layer having dual structure.

Problems solved by technology

The liquid crystal display may be easily designed to be thinner, but may have low visibility from lateral sides compared to visibility from front sides.

Arcing may occur between metals formed on a deposition apparatus and the substrate when depositing the passivation layer, which may generate a defect on the substrate.