This application relates to the field of two-dimensional
semiconductor material preparation technology, specifically to a method for preparing
monolayer molybdenum disulfide by dual-
sulfur source
chemical vapor deposition, comprising the following steps: Step 1, providing a
chemical vapor deposition reaction chamber having an upstream region, a growth region, and a downstream region; Step 2, arranging a
molybdenum-containing precursor in the growth region, and arranging a substrate above or opposite to the
molybdenum-containing precursor; Step 3, arranging a first
sulfur-containing precursor in the upstream region and a second
sulfur-containing precursor in the downstream region; Step 4, introducing a carrier gas into the
reaction chamber and heating it to cause the first sulfur-containing precursor, the second sulfur-containing precursor, and the molybdenum-containing precursor to volatilize and undergo a
chemical vapor deposition reaction on the
substrate surface to form a
monolayer molybdenum disulfide. This invention employs a dual-sulfur source strategy, achieving large-size, uniform, and low-defect preparation of
monolayer MoS2, facilitating widespread application.