Shielding plate for enhancing flow field uniformity
A shielding plate and uniformity technology, which is applied in the field of microelectronics, can solve problems such as uneven etching rate, and achieve the effects of improving distribution uniformity, improving flow field uniformity, and reducing pressure difference
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[0028] The specific implementation of the shielding plate for improving flow field uniformity of the present invention will be described in further detail below in conjunction with the accompanying drawings, but it is not used to limit the scope of protection of the present invention.
[0029] See Figures 3 and 4. The structure of the first embodiment of the shielding plate for improving the uniformity of the flow field of the present invention includes an annular plate body 1, on which a number of air holes are radially distributed from the center to the circumferential direction, and some air holes are formed from the plate body. 1 The center gradually becomes larger toward the circumference. The cross-sectional shape of the air hole is quadrilateral, and in each quadrilateral hole, a partition is respectively arranged along the two diagonals of the quadrilateral, and the quadrilateral air hole is divided into four triangular air holes, and the longitudinal section of each t...
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