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Regulating apparatus and regulating method for slit spray nozzle front end

A slit nozzle and adjusting device technology, which is applied to spraying devices, spraying devices, chemical instruments and methods, etc., can solve problems such as a large amount of cleaning liquid, uneven expansion of liquid droplets, and inability to uniformly clean the front end of the nozzle, and achieve effective adjustment, The effect of shortening time

Active Publication Date: 2009-01-14
艾美柯技术株式会社
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

In this case, there is a problem that the tip of the nozzle cannot be cleaned evenly, and a large amount of cleaning fluid is required
However, in the case of the immersion type, the cleaning liquid infiltrates from the opening of the slit nozzle during immersion, and the coating liquid is diluted, and the bead spreads unevenly at first.

Method used

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  • Regulating apparatus and regulating method for slit spray nozzle front end
  • Regulating apparatus and regulating method for slit spray nozzle front end
  • Regulating apparatus and regulating method for slit spray nozzle front end

Examples

Experimental program
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Embodiment Construction

[0041] Embodiments of the present invention will be described below with reference to the accompanying drawings. in, figure 1 is a structural diagram of a slit nozzle front end adjustment device according to the present invention, figure 2 yes figure 1 The piping diagram of the premix section in image 3 (a) and (b) are respectively figure 2 b-b sectional view and c-c sectional view in, Figure 4 yes figure 1 The pipe layout diagram of the cleaning part in the d-d cross-sectional view, Figure 5 (a) is another example of the premixing section, and (b) is a cross-sectional view of e-e in (a).

[0042] Such as figure 1 As shown, an immersion cleaning unit 2 is provided in the middle of the adjustment device 1 at the front end of the slit nozzle, and the bottom surface of the immersion cleaning unit is provided with a supply port (A) for supplying cleaning liquid and a discharge port capable of adjusting the liquid level of the cleaning liquid. (B) (refer toimage 3 )...

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Abstract

Provided is a device for adjusting a compact slit nozzle without causing washing nonuniformity of the slit nozzle and also being able to save a washing liquid, and a method for adjusting the slit nozzle using the device for adjusting. The device for adjusting the tip end of the slit nozzle opened with the discharge port of a coating liquid having a predetermined width comprises an immersion type washing part for washing the slit nozzle, a drying part for drying the nozzle after washing and a pre-dispense part for preparing the discharge port of the slit nozzle, and is mounted on the same apparatus. The immersion type washing part also serves as a drying prevention part which holds the tip end of the slit nozzle in immersed state when the slit nozzle is not used for a prescribed time or longer.

Description

technical field [0001] The invention relates to an adjusting device and an adjusting method for adjusting the front end of a slit nozzle. Background technique [0002] Conventionally, in order to apply a resist or the like on the surface of a plate-shaped object to be processed such as a semiconductor wafer or a glass substrate, the coating liquid is dripped from a nozzle to the center of the object to be processed placed on a spinner, and the object to be processed is passed through the spinner. The centrifugal force generated by the rotation spreads the coating liquid outward. However, in this method, the remaining coating liquid on the surface of the object to be treated is very little, and almost all of it is scattered and wasted. Therefore, instead of spinner coating, it is conceivable to open a coating liquid discharge port of a predetermined width in the nozzle itself, and apply a coating liquid of a predetermined width to the surface of the object to be treated by mo...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): B05C11/10B05C11/00B05C5/02B08B3/02B08B3/04H01L21/027H01L21/304
CPCB05B1/044B05C5/02B08B3/04G03F7/16H01L21/6715
Inventor 岛井太河田茂
Owner 艾美柯技术株式会社
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