Regulating apparatus and regulating method for slit spray nozzle front end

A slit nozzle and adjusting device technology, which is applied to spraying devices, spraying devices, chemical instruments and methods, etc., can solve problems such as a large amount of cleaning liquid, uneven expansion of liquid droplets, and inability to uniformly clean the front end of the nozzle, and achieve effective adjustment, The effect of shortening time
CN100450643CActive Publication Date: 2009-01-14艾美柯技术株式会社
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
艾美柯技术株式会社
Publication Date
2009-01-14

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Abstract

Provided is a device for adjusting a compact slit nozzle without causing washing nonuniformity of the slit nozzle and also being able to save a washing liquid, and a method for adjusting the slit nozzle using the device for adjusting. The device for adjusting the tip end of the slit nozzle opened with the discharge port of a coating liquid having a predetermined width comprises an immersion type washing part for washing the slit nozzle, a drying part for drying the nozzle after washing and a pre-dispense part for preparing the discharge port of the slit nozzle, and is mounted on the same apparatus. The immersion type washing part also serves as a drying prevention part which holds the tip end of the slit nozzle in immersed state when the slit nozzle is not used for a prescribed time or longer.
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Description

technical field

[0001] The invention relates to an adjusting device and an adjusting method for adjusting the front end of a slit nozzle. Background technique

[0002] Conventionally, in order to apply a resist or the like on the surface of a plate-shaped object to be processed such as a semiconductor wafer or a glass substrate, the coating liquid is dripped from a nozzle to the center of the object to be processed placed on a spinner, and the object to be processed is passed through the spinner. The centrifugal force generated by the rotation spreads the coating liquid outward. However, in this method, the remaining coating liquid on the surface of the object to be treated is very little, and almost all of it is scattered and wasted. Therefore, instead of spinner coating, it is conceivable to open a coating liquid discharge port of a predetermined width in the nozzle itself, and apply a coating liquid of a predetermined width to the surface of the object to be treated by mo...

Claims

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