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Coating clamp and coating carrying disk thereof

A carrier and fixture technology, which is applied in the field of coating fixtures with ring-shaped wave-shaped coating carriers, can solve the problems that the arrangement of workpieces cannot effectively use the coating space and the uneven thickness of the coating, etc.

Active Publication Date: 2009-04-29
IND TECH RES INST
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Since the target (not shown) is sputtered from both sides of the coating fixture 10, for the sputtered target, the workpiece closer to the target will cover the workpiece farther away from the target, resulting in The workpiece of the target material will have different coating thickness relative to the workpiece farther away from the target, so it will cause uneven coating thickness, and the arrangement of workpieces cannot effectively use the coating space.

Method used

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  • Coating clamp and coating carrying disk thereof
  • Coating clamp and coating carrying disk thereof
  • Coating clamp and coating carrying disk thereof

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Embodiment Construction

[0021] Figure 2a It is a perspective view of a coating carrier in the coating fixture of the present invention. Figure 2b for Figure 2a cutaway view. The coating tray 20 includes a tray body 22 and a flange 24 . The disk body 22 is ring-shaped, forming a wave shape on the surface of the disk body 22, and the disk body 22 is inclined upwards, and has an inclination angle with the horizontal plane. In this embodiment, the inclination angle is between 0 degrees and 75 degrees. , the best inclination angle is 15-30 degrees. The flange 24 extends upward from the inner circumference of the disc body 22 and has a predetermined angle with the disc body 22 . The outer side of the top of the flange 24 forms a constriction 26, and the inner side of the flange 24 forms a shoulder 28, which is engaged with the shoulder 28 of the other coating carrier 20 by the necking part 26 of one coating carrier 20. Each coating carrier plate 20 can be combined into an upright cylindrical stack,...

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Abstract

The invention relates to a coating fixture and coating loading disk, said costing fixture comprises a plurality of coating loading disks, and the loading disks can be separately used or formed into a vertical stack, each loading disk is equipped with a disk body, and there is a struction in wave type on the surface of disk body, and there is tile angle a between disk body and horizontal surface. The workpiece for coating is set in the trough in the wave structure on the surface of disk body. The number of workpiece for coating can be dramatically increased in limit coating area by using said coating fixture with good quality and uniformitity.

Description

technical field [0001] The present invention relates to a coating jig, in particular to a coating jig with an annular corrugated coating carrier. Background technique [0002] As the current usage of precision milling cutters and drills increases rapidly with the development of various precision machining industries, in order to meet the needs of economic benefits, it is necessary to improve their quality and characteristics and reduce manufacturing costs. However, the design method of the traditional coating fixture basically cannot effectively use the coating space; the number of workpieces placed in the coating chamber cannot achieve more competitive economic benefits; the cost of coating the workpiece is quite large and expensive. And because the workpiece is placed incorrectly, the surface of the workpiece away from the coating target area may have insufficient energy of the particles, resulting in uneven film deposition. [0003] Taiwan Patent No. 538975 discloses a c...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C23C14/34
Inventor 吕明生施进德吴清勋
Owner IND TECH RES INST