Method for the production of a monolithic multilayer actuator, monolithic multilayer actuator made of a piezoceramics or electrostrictive material, and external electrical contact for a monolithic mul
A technology of electrostrictive materials and piezoelectric ceramics, applied in piezoelectric/electrostrictive/magnetostrictive devices, piezoelectric effect/electrostrictive or magnetostrictive motors, generators/motors, etc., can solve High overhead, crack growth, high cost of internal electrodes, etc.
Inactive Publication Date: 2009-04-29
PI CERAMIC
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Problems solved by technology
In the described method, gaps are formed on the pristine ceramic film during sintering by means of a thermally decomposable layer, which has the additional problem of possibly uncontrolled crack growth during sintering, which can only be achieved by A particularly expensive implementation of the internal electrodes can only be avoided
This solution is expensive when the electrode spacing is 50-250 μm
Method used
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[0052] figure 1 The embodiment of a multilayer actuator according to the prior art shown in is based on an alternating digital electrode structure. The actuator itself is designated with reference numeral 1 and the piezoceramic layer with reference numeral 2 . The internal electrodes 3 and 4 are led out on opposite sides until they reach the surface. The base metallization layer 5 serves as a parallel circuit for the individual electrode groups. An inactive region 6 of the actuator 1 is not piezoelectrically stretched when polarized and when the actuator 1 is in operation, and forms a potential site for stress cracking.
[0053] according to Figure 2a In the embodiment in and 2b, the actuator according to the present invention comprises a piezoelectric ceramic layer 2 with a thickness in the range of 20-100 μm. The layers are connected to each other by internal electrodes 3 and 4, preferably composed of an AgPd alloy, which lead alternately to the oppositely arranged surf...
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The invention relates to a method of manufacturing a monolithic multilayer actuator, a corresponding monolithic multilayer actuator, and external electrical contacts for a monolithic multilayer actuator. According to the invention, along the longitudinal axis of the stacked structure of the actuator, substantially parallel to and at a distance from the inner electrodes, in the region of at least two oppositely arranged outer surfaces, purposefully in the actuator structure Adding slight perturbations, the known inner electrodes protrude towards the outer surface area. As early as in the polarization of the actuator, the slight disturbance creates a predetermined, limited stress-relieving crack growth in the inner and / or towards the outer electrode, wherein at least in the region of the slight disturbance in the actuator structure The base metallization layer and / or the external contacts are internally stretch-resistant or elastically formed.
Description
technical field [0001] The invention relates to a method for producing a monolithic multilayer actuator made of piezoceramic or electrostrictive material, wherein the actuator is to some extent made of a plurality of piezoelectric The form of the mechanical tandem structure of the plates is configured as a stack, the known internal electrodes in the plate-like stack being led to the outer surface of the opposite stack and there by means of the base metallization of the individual electrode groups ( Grundmetallisierung) and external contacts are connected in parallel. In addition, the present invention also relates to a monolithic multilayer actuator made of piezoelectric ceramic or electrostrictive material, wherein the actuator is a stacked structure of piezoelectric plates, in which internal electrodes, common base metallization layers and external contacts. Background technique [0002] Piezoelectric actuators are electromechanical sensors in which the mutual piezoelect...
Claims
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IPC IPC(8): H01L41/24H01L41/083H01L41/047H10N30/80H02N2/00H02N2/04H10N30/053H10N30/063H10N30/50H10N30/853H10N30/87
CPCH01L41/0472H01L41/0838H01L41/293H01L41/273H10N30/872H10N30/508H10N30/063H10N30/053
Inventor 阿斯特里德·海因茨曼埃伯哈德·亨尼希丹尼尔·科普施帕特里克·佩尔奇斯特凡·里希特艾克·韦斯多费尔
Owner PI CERAMIC