Mold, pattern forming method, and pattern forming apparatus
A mold and pattern technology, applied in the field of mold and substrate alignment, can solve the problems of poor visibility of alignment marks and inability to clearly observe alignment marks, etc.
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no. 1 example
[0090] (first embodiment: mold 1)
[0091] will refer to figure 1 The mold of this embodiment is described.
[0092] refer to figure 1 , the mold 1100 has a first surface 1050, a second surface 1060 opposite to the first surface 1050, a pattern area 1000 formed on the first surface 1050, embedded in the mold 1100 so as not to be exposed on the first surface 1050 and the second surface Marks for alignment (alignment marks) 1070 on 1060 .
[0093]The material used to form the mold 1100 and the material used to form the alignment mark 1070 are different from each other, so that the refractive index may be different therebetween. In consideration of optically reading the alignment mark 1070, the difference in refractive index is preferably not less than 0.1, for example. The material of the alignment mark 1070 is not particularly limited as long as it can secure a difference in refractive index from the mold 1100 and can be optically read. For example, alignment marks 1070 ma...
no. 2 example
[0147] (second embodiment: mold 2)
[0148] The mold of this embodiment is characterized in that it includes a first surface having a pattern area for transfer, a second surface opposite to the first substrate, a first mark provided on the first substrate, and a marker provided toward the second substrate. The second mark on the position of the second surface away from the first surface. The second marker is for example in Figure 3A and 3B Mark 102 shown in .
[0149] refer to Figures 3A to 3D Describe the model more explicitly.
[0150] In these figures, with Figures 2A to 2D The same reference numerals denote the same parts or parts as those described in the first embodiment.
[0151] for Figures 3A to 3D , the first mark 1077 is disposed on the same surface as the pattern area 101 having the embossed portion (not shown). The first surface is a surface on which the pattern region 101 is formed, and the second surface is a surface 3101 opposite to the first surfac...
no. 3 example
[0157] (Third embodiment: pattern forming method 1)
[0158] The pattern forming method of this embodiment is performed as follows.
[0159] First, a mold is prepared which is provided with a first surface including a pattern area, a second surface opposite to the first surface, and an alignment mark provided at a position away from the first surface toward the second surface. For example, the model is shown in figure 1 to 3.
[0160] Then, the patterned area of the mold and the coating material of the substrate, such as photocurable resin or resist, are brought into contact with each other.
[0161] exist Figure 17A Among them, 5000 represents the substrate, 3000 represents the coating material, and 104 represents the mold. In addition, 1000 denotes a region where the imprint pattern to be transferred onto the coating material is formed. In this figure, the actual embossed portion of the embossed pattern 1000 is not shown. The alignment mark 2070 is provided on the b...
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