Novel precision grinding polishers

Abstract

The invention relates to a novel precise grinding and polishing machine, which comprises a polishing pad provided with grinding and polishing materials, and a fixing and regulating device for a sample. The machine is characterized in that the fixing and regulating device comprises a base, an oriented column and a precise silk pole which are parallel to each other, a top disk and a middle disk which parallel to the polishing pad, wherein, the precise silk pole is arranged vertically between the top disk and the base via a bearing; the oriented column is vertically fixedly connected with the top disk and the base; the middle disk is arranged between the top disk and the base and positioned over the polishing disk; a through hole is matched with the oriented column by gap, and a thread hole is combined with the precise silk pole to form a bolt and nut pair; a handle is arranged on the upper end of the precise silk pole; the middle disk is provided with guide rails arranged radially; a sliding frame slides along the guide rails; a material loading block embedded in the bearing, and the bearing placed in the sliding frame, are combined by gap; the sample is fixed at the bottom surface of the material loading block; and the inner of the material loading block is a hollow structure. The device can effectively prevent the grinding offset of the sample, accurately controls the grinding amount, and has less material consumption and high efficiency.

Description

technical field [0001] The invention belongs to precision grinding and polishing machine equipment, in particular to a novel precision grinding and polishing machine for samples of semiconductor materials, ceramic materials and metal materials. Background technique [0002] In the structure of the usual metallographic sample polishing machine, the motor drives the grinding disc to rotate at a relatively fast speed. Generally, there are one or several fixed speeds. When working, it is necessary to hold the sample or a carrier block and perform grinding and polishing on sandpaper or polishing cloth. This kind of polishing machine mainly grinds metal or ceramic samples, with simple structure and convenient operation. Since the sample is manually held, the sample is easy to be ground off-center, and the grinding amount is difficult to control accurately. Most of the existing domestic precision grinding and polishing machines use fixtures in two to three positions to clamp the t...

AI Technical Summary

Problems solved by technology

Since the sample is manually held, the sample is easy to be ground off-center, and the grinding amount is difficult to control accurately

Most of the existing precision grinding and polishing machines in China use two to three positions of fixtures to clamp the trimming ring, and the loading block is placed in the ring. It is necessary to hold the loading block; when the parallelism of the upper and lower surfaces of the sample is low or the thickness is uneven, the sample is easy to be worn out, and the amount of grinding is not easy to control

In the precision grinding and polishing machines reported abroad, the grinding disc adopts a lifting mechanism or a spring pressure device to adjust the pressure between the grinding disc and the workpiece, and the grinding amount cannot be precisely controlled; when the sample has low flatness or uneven thickness, the sample is also easy to wear off

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