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Vacuum pump

A technology of vacuum pumps and rotors, applied in the direction of pumps, pump control, axial flow pumps, etc., can solve the problems of indirect measurement that is not very accurate and rapid temperature changes, and achieve the effect of accurate and error-free transmission

Inactive Publication Date: 2010-01-27
OERLIKON LEYBOLD VACUUM
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Indirect measurements are not very precise and are not suitable for monitoring rapid temperature changes in pump rotors

Method used

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  • Vacuum pump

Examples

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Embodiment Construction

[0013] The drawing shows a vacuum pump 10 designed as a turbomolecular pump. The vacuum pump 10 has a pump part mainly formed by a pump stator 12 and a pump rotor 14 . Further, the vacuum pump has a drive and bearing part, in which two bearings 16, 18 and a drive motor 20 are arranged.

[0014] Arranged on the stator side is a receiving antenna 30 which is designed to be open and arranged in a ring around the rotor shaft 22 . The receiving antenna 30 on the stator side is electrically connected to a control module 32 for controlling the transmission, reception and evaluation operations of the signals received by the receiving antenna 30 .

[0015] A corresponding loop transmitting antenna 40 is arranged on the rotor side—that is, at a position axially opposite the receiving antenna 30 . Further, the pump rotor 14 includes a temperature sensor connected to a transponder 42 which in turn is connected to a transmitting antenna 40 .

[0016] The measuring transducer 44 is a tem...

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Abstract

A vacuum pump (10) according to the invention has a pump rotor (14) and a pump stator (12). The pump rotor (14) has an electrical measuring transducer (44), for example a temperature sensor. A transmitting antenna (40), which is provided with the measuring transducer (44), is provided on the pump rotor (14). A receiving antenna (30), which receives measurement values of the measuring transducer (44) from the transmitting antenna (40), is provided on the pump stator (12) so as to be situated opposite the transmitting antenna (40). In this way, accurate measurement values can be transmitted from the pump rotor (14) to the pump stator (12).

Description

technical field [0001] The invention relates to a vacuum pump comprising a pump rotor and a pump stator. Background technique [0002] In vacuum pumps—especially fast-rotating turbomolecular pumps—the pump rotor can heat up due to heat of compression, heat of friction, and possibly other effects. Excessive rotor temperatures increase the risk of pump rotor damage, cause material fatigue and alter other properties of the pump rotor. For this reason, it is necessary, if necessary, to monitor and record the rotor temperature. [0003] The rotor temperature can be measured by relatively expensive pyrometry. Alternatively, the rotor temperature may be determined indirectly by measuring the stator temperature and deriving the rotor temperature from the stator temperature. Indirect measurements are not very accurate and are not suitable for monitoring rapid temperature changes of pump rotors. Contents of the invention [0004] In view of this, it is an object of the present i...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): F04D19/04
CPCF04D19/042F04D27/001
Inventor 阿洛伊斯·格雷文托马斯·隆格里希
Owner OERLIKON LEYBOLD VACUUM