Stack silicon-base miniature fuel celles and manufacturing method

A fuel cell stack and fuel cell technology, which is applied in the direction of fuel cell grouping, fuel cells, chemical instruments and methods, etc., can solve the problems of large packaging volume ratio, low single cell output voltage, and small output current density range, and achieve packaging Small size, small battery internal resistance, and large performance improvement
CN101000968AInactive Publication Date: 2007-07-18TSINGHUA UNIV
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Patent Information

Authority / Receiving Office
CN ยท China
Patent Type
Applications(China)
Current Assignee / Owner
TSINGHUA UNIV
Publication Date
2007-07-18
Estimated Expiration
Not applicable ยท inactive patent

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Abstract

Stacked silicon-based micro fuel cell group and its production method belong to the field of micro-energy and micro-machining areas. It includes the single cell stacking, sealing component, claming component and fluid catheter. Two or more fuel cell single batteries form stack, which order is: the second outer plate (12), the second membrane electrode (22), the inner plate (13), the first membrane electrode (21) and the first outer plate (11), and use the clamping and sealing components to seal package. The production method includes processing silicon plate and seal packaging of different component parts, using silicon micro-machined to produce a drainage channel, packaging the single cell stack. The invention has small resistance of battery, small package size, flexible flow graphic design, various series and parallel forms, which can get a larger output current and voltage when a small increase in the volume of cases.
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Description

Technical field

[0001] The invention relates to a stacked silicon-based micro fuel cell stack and a manufacturing method thereof, and belongs to the field of micro energy and micro mechanical processing. Background technique

[0002] Micro fuel cell is a device that directly converts the chemical energy of fuel (such as methanol, hydrogen, etc.) into electrical energy. With its high energy density, environmental protection and pollution-free, the fuel is easy to store and transport, and work at room temperature. Notebook computers, PDAs, digital cameras), wireless communication networks (such as mobile phones, GPS, sensor network nodes), micro-systems (such as system-on-chip, SOC, micro-systems composed of MEMS devices) have outstanding advantages. The silicon-based micro fuel cell produced by mature MEMS technology has the advantages of high accuracy, good repeatability, and low mass production cost. It is expected to be integrated with other MEMS devices and IC circuits to prom...

Claims

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