Photomask substrate container unit, photomask substrate transportation and exposal method

Abstract

A photomask substrate container unit according to this invention is for conveying and / or storing a photomask substrate and comprises a housing for receiving therein the photomask substrate and holding members for holding the photomask substrate in an inclined posture at a predetermined inclination angle. The photomask substrate container unit can be reduced in height as compared with a longitudinal-type photomask substrate container unit adapted to hold the photomask substrate vertically. Thus, not only the conveyance / storage of the photomask substrate container unit can be facilitated, but also it is possible to avoid the disadvantage that the transportation method is limited.

Description

technical field [0001] The present invention relates to a photomask substrate container unit for transporting and / or storing photomask substrates, and in particular, to a container unit suitable for transporting and / or storing photomask substrates in the manufacture of liquid crystal display panels (LCDPs), plasma display panels ( Photomask substrate container unit for large-sized photomask substrates used in PDPs) and the like. [0002] Furthermore, the present invention relates to a photomask substrate transport method, a photomask product manufacturing method, and a photomask exposure / transfer method using such a photomask substrate container unit. Background technique [0003] In recent years, in manufacturing display panels such as LCDPs and PDPs, as a technique for reducing manufacturing costs, it has become common to increase the number of panels on each of the panel mother substrates, whereby there is a panel mother substrate size increasing trend. Accordingly, pho...

AI Technical Summary

Problems solved by technology

[0014] However, when transporting a large-sized photomask substrate K using a portrait type pod, since the pod becomes taller, it is possible that the front Vision is obstructed by the pod, so transport of the pod becomes very difficult, and in addition, shipping methods are limited

[0015] In addition, there is a problem that the vertical type photomask pod is prone to fall down because the vertical type photomask pod increases the aspect ratio as the size of the photomask substrate increases

If these operations are performed by a single worker, it may happen that the photomask cassette accidentally falls over during the operation, thus requiring multiple workers

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