Stage device

Abstract

The invention is to increase the size of a suction cup by making the suction cup correspond to an increase of the size of a workpiece, and to smoothly move the suction cup together with a stage, while maintaining flatness accuracy. This stage device 10 has a stone surface plate 20, the stage 30 moving on a plane of the stone surface plate 20, the suction cup 40 mounted on the stage 30 to suck the flat plate shaped workpiece, and a pair of Y linear motors 50 for moving the stage 30 in the Y direction. The suction cup 40 has a square-shaped suction surface 42. Four sides of the X and Y directions of the suction surface 42 are formed to have larger dimensions than that of an X stage 38, and a width dimension of the X direction is formed to have a smaller dimension than that of the stone surface plate 20. The stage device 10 has four supports 60 extending in the vertical direction from a lower face of the suction cup 40 and an air pad 70 provided at a lower end of each support 60 to be movable by floating on the plane of the stone surface plate 20 by air pressure. The suction cup 40 is moved on the stone surface plate 20 since the supports 60 and the air pad 70 are directly supported.

Description

technical field [0001] The present invention relates to a stage device, and more particularly, to a stage device configured so that the suction area of ​​a suction pad mounted on a stage corresponds to an increase in the size of a workpiece. Background technique [0002] For example, in the stage device, there is a Y stage moving in the Y direction and an X stage moving in the X direction, and the Y stage is guided to move along a pair of Y direction guide rails fixed on the stone platform. direction, and the X stage is guided in the moving direction along the X direction guide rails placed on the Y stage (for example, refer to Patent Document 1). [0003] In such a stage device, a structure is adopted in which sliders coupled to both ends of the stage move relative to a guide rail made of stone material fixed on the above-mentioned stone platform to move in a floating state. [0004] Furthermore, under the X stage and the Y stage, an air cushion is provided which floats un...

AI Technical Summary

Problems solved by technology

[0006] However, for example, when the size of a flat workpiece increases, the stage device must increase the suction area of ​​the suction pad that suctions the workpiece, so that the X stage and the stone table that support the suction pad also become larger. Furthermore, the problem of increasing the size of the entire device

[0007] Moreover, if the entire device continues to grow in size, there will be problems such as difficulty in securing stone materials and stone processing, and difficulty in transportation due to increased weight.

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