Stage device

Abstract

The invention relates to a method for enlarging sorption disk corresponding to enlargement of workpiece, and keeping planer accuracy and making the sorption disk to move smoothly in following a carrying stage. The carrying stage device (10) has: stone platform (20), the carrying stage (30) moving on the plane of the stone platform, the sorption disk (40) carried on the carrying stage and for sorption of plane workpiece, a pair of Y linear motors (50) for moving the carrying stage along Y direction. The sorption disk has quadrangular sorption face (42), and size of four sides in X, Y directionsof the sorption face is larger than the size of X carrying stage, and width size in X direction is smaller than the size of the stone platform. And the invention has four pillars (60) straight extending downwards form the underside of the sorption disk, and air cushions (70) arranged at lower ends of each pillar and floating up under air pressure and capable of moving on the stone platform. The sorption disk is directly supported by pillars and air cushions, and can move on the stone platform.

Description

technical field [0001] The present invention relates to a stage device, and more particularly, to a stage device configured so that the suction area of ​​a suction pad mounted on a stage corresponds to an increase in the size of a workpiece. Background technique [0002] For example, in the stage device, there is a Y stage moving in the Y direction and an X stage moving in the X direction, and the Y stage is guided to move along a pair of Y direction guide rails fixed on the stone platform. direction, and the X stage is guided in the moving direction along the X direction guide rails placed on the Y stage (for example, refer to Patent Document 1). [0003] In such a stage device, a structure is adopted in which sliders coupled to both ends of the stage move relative to a guide rail made of stone material fixed on the above-mentioned stone platform to move in a floating state. [0004] Furthermore, under the X stage and the Y stage, an air cushion is provided which floats un...

AI Technical Summary

Problems solved by technology

[0006] However, for example, when the size of a flat workpiece increases, the stage device must increase the suction area of ​​the suction pad that suctions the workpiece, so that the X stage and the stone table that support the suction pad also become larger. Furthermore, the problem of increasing the size of the entire device

[0007] Moreover, if the entire device continues to grow in size, there will be problems such as difficulty in securing stone materials and stone processing, and difficulty in transportation due to increased weight.

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