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Fault inspecting system and its management

A technology of error detection and management methods, applied in the field of error detection systems and their management, which can solve problems such as damage and inability to remediate immediately

Inactive Publication Date: 2010-08-25
PROMOS TECH INC
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, the known error detection system does not design any self-monitoring or error diagnosis mechanism, so when an error occurs in an internal module of the system, it cannot be immediately remedied and causes greater damage

Method used

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  • Fault inspecting system and its management
  • Fault inspecting system and its management
  • Fault inspecting system and its management

Examples

Experimental program
Comparison scheme
Effect test

Embodiment Construction

[0022] Figure 1 illustrates an error detection system 10 of the present invention. The error detection system 10 includes a data server 14 for collecting the parameters of at least one machine 12, at least one error sensing module 16 that can send an abnormal signal when the parameter exceeds a preset specification, and can be used when the error sensing module 16 is abnormal. The monitoring module 18 restarted during work, the remote controller 20 used to control the data server 14 , the error sensing module 16 and the monitoring module 18 . Preferably, the machine 12 , the data server 14 , the error sensing module 16 , the monitoring module 18 and the remote controller 20 are coupled to each other through a network. In addition, the remote controller 20 can be connected to the factory 30 (such as a new factory building) through another network 32, which includes another error detection system 10 and the machine 12, so that the factory 30 can pass through the remote controlle...

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Abstract

An error detection system comprises data server for collecting parameters of machine, error induction module for launching out abnormal signal when said parameters are out off preset ranges, monitor module for restarting said error induction module when error induction module is not operated properly and remote controller for controlling said data server and said error induction module as well assaid monitor module. Its managing method is also disclosed.

Description

technical field [0001] The present invention relates to an error detection system and its management method, in particular to an error detection system capable of self-monitoring and error-diagnosing and its management method. Background technique [0002] Continuous advances in integrated circuit manufacturing technology have resulted in the development of many new semiconductor processes, which typically require many inputs that must be finely regulated to maintain better process quality. Many different processes are required from semiconductor raw materials to packaged integrated circuit components, such as the growth process of semiconductor materials, the cutting process from semiconductor ingots to wafers, thin film deposition processes, etching processes, implantation processes, packaging processes, and testing procedures , and these processes are quite different from each other, most of them are carried out in different areas, and most of the different processes use ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G05B19/048H01L21/66
Inventor 杨正杰林文迪邱皇文
Owner PROMOS TECH INC