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Method for manufacturing transparent conductive film cling matrix

A technology of transparent conductive film and manufacturing method, which is applied in the direction of cable/conductor manufacturing, semiconductor/solid-state device manufacturing, semiconductor device, etc., and can solve the problems of difficulty in controlling the rotation speed, difficulty in forming a transparent conductive film, difficulty in transparent conductive film, etc.

Inactive Publication Date: 2010-07-28
NIPPON SODA CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0010] However, when the film is formed on a substrate with a curved surface or a concave-convex shape, if a physical film-forming method such as the sputtering method is used, the physical film-forming method starts to vapor-deposit and form a film from one direction of the substrate, which is very difficult. It is difficult to form a transparent conductive film with a uniform thickness on curved parts or uneven parts
Specifically, for example, when forming a transparent conductive film on a quartz fiber, when using physical film-forming methods such as sputtering, the quartz fiber must be rotated to make the film thickness uniform during film formation, but its rotational speed control is very difficult, and It is also difficult to form a transparent conductive film with a uniform film thickness
[0011] In the dipping method, one of the chemical film-forming methods, the transparent conductive film-forming liquid can be evenly coated on the substrate with a curved surface or a concave-convex shape, but in the next step of thermal decomposition and drying, it is difficult to remove evenly If solvent is used, it is difficult to form a transparent conductive film with a uniform film thickness. Therefore, it is necessary to develop a method that can form a transparent conductive film with a uniform film thickness on a substrate with a curved surface or a concave-convex shape.

Method used

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  • Method for manufacturing transparent conductive film cling matrix
  • Method for manufacturing transparent conductive film cling matrix
  • Method for manufacturing transparent conductive film cling matrix

Examples

Experimental program
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Effect test

Embodiment 1

[0094] Indium triacetylacetonate (In(AcAc) 3 ) was dissolved in acetylacetone so that the molar concentration was 0.2mol / L to obtain a yellow transparent solution. Di-n-butyltin diacetate was added as a tin compound to this solution so that Sn / In=5% by mass, thereby preparing an ITO film-forming liquid (transparent conductive film-forming liquid). At this time, the content of the alkali metal was as follows: indium triacetylacetonate was 0.03 mass ppm, acetylacetone was 0.05 mass ppm, and di-n-butyltin diacetate was 0.03 mass ppm.

[0095] Use the ITO film-forming solution to adjust the amount of chemical thermal decomposition generated by the atomization of the ITO film-forming solution through the high-temperature sol treatment method. At the same time, use the SiO 2 An ITO film with a film thickness of 20 nm was formed on the film-coated glass substrate (SLG substrate) to obtain an ITO film-attached glass substrate (transparent conductive film attachment substrate) with a ...

Embodiment 2

[0097] An ITO film with a film thickness of 40 nm was formed on a glass substrate in the same manner as in Example 1 above to obtain an ITO film-attached glass substrate with a transparent ITO film.

Embodiment 3

[0099] An ITO film with a film thickness of 200 nm was formed on a glass substrate in the same manner as in Example 1 above to obtain an ITO film-attached glass substrate with a transparent ITO film.

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Abstract

The invention provides a transparent conductive film forming liquid which forms transparent conductive film with even folium resistance value and transparence property. The invention also provides a manufacturing method of transparent conductive film attached base, said transparent conductive film attached base includes even folium resistance value and transparence property. Concretely, transparent conductive film forming liquid with following characters and manufacturing method of transparent conductive film attached base with the transparent conductive film forming liquid are provided, saidtransparent conductive film forming liquid is characterized in that it includes indium compound expressed with formula [1] and stannum compound expressed with formula [2], it also may includebeta- diketone compound which dissolves the indium compound expressed with formula [1] and stannum compound expressed with formula [2]: In(R1COCHCOR2)3 [1], thereinto, R1 and R2 separately expresses the alkyl or phenyl whose carbon atomicity is 1-10; (R3)2Sn(OR4)2 [2], thereinto, R3 expresses the alkyl whose carbon atomicity is 1-10, R4 expresses the alkyl whose carbon atomicity is 1-10 or acyl whose carbon atomicity is 1-10.

Description

[0001] This application is a divisional application of a Chinese patent application with an application date of December 12, 2003, an application number of 200310120293.9, and an invention titled "Transparent Conductive Film Forming Liquid and Method for Manufacturing a Transparent Conductive Film Adhesive Substrate Containing the Forming Liquid" . technical field [0002] The present invention relates to a transparent conductive film-forming liquid and a method for producing a transparent conductive film-attached substrate containing the transparent conductive film-forming liquid. Background technique [0003] Transparent conductive film (ITO film) is widely used in liquid crystal displays, electroluminescent displays, surface heaters (surface heaters), contact (タツチpanel) electrodes, solar cells, etc. by virtue of its excellent transparency and conductivity . [0004] Since transparent conductive films are so widely used in many fields, they are required to have various sh...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01B13/00H01L21/288H01L33/00H01L31/18
CPCY02P70/50
Inventor 瀬田康弘权平英昭大芦竜也山田茂男神田广行
Owner NIPPON SODA CO LTD