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Flow sensor transducer with dual spiral wheatstone bridge elements

A technology of temperature sensor and heating element, applied in the field of resistance temperature detector, flow sensor and sensor system, which can solve the problem of expensive platinum

Inactive Publication Date: 2007-12-12
HONEYWELL INT INC
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0004] platinum is very expensive

Method used

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  • Flow sensor transducer with dual spiral wheatstone bridge elements
  • Flow sensor transducer with dual spiral wheatstone bridge elements
  • Flow sensor transducer with dual spiral wheatstone bridge elements

Examples

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Embodiment Construction

[0022] The specific values ​​and configurations discussed in these non-limiting examples may vary and are cited merely to illustrate at least one embodiment and are not intended to limit the scope thereof. In general, the drawings are not drawn to scale.

[0023] Figure 1 illustrates a composite top view of all layers residing on a substrate 101 representing a complete flow sensor in accordance with aspects of these embodiments. Fluid may flow from channel inlet 102 to channel outlet 103 . As the fluid flows, it passes the first upstream temperature sensor 104 and the second upstream temperature sensor 105 . The fluid may then be heated by heater 113 . The heated fluid then flows through the first downstream temperature sensor 106 and the second downstream temperature sensor 107 .

[0024] The first contact pad 108 and the second contact pad 109 are electrically connected to the second upstream temperature sensor 105 . Current can flow into the first contact pad 108 , thro...

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Abstract

A flow sensor transducer can measure fluid flow rates as a fluid flows though a channel and under an air bridge. Resistive thermal devices (RTDs) and a heater are on top of the air bridge with two RTDs upstream of the heater and two downstream. The RTDs can be connected in a Wheatstone bridge configuration. A magnetoresistive material that changes its electrical resistance based on its temperature can be used to form the RTDs. The temperature response of magnetoresistive materials, however, can change due to magnetic fields and to the material's magnetic history. Forming the RTDs into a dual spiral structure minimizes the effect of magnetic fields. As such, a magnetoresistive material such as permalloy can be used instead of an expensive material such a platinum. The resulting flow sensor transducer can be formed using standard semiconductor processing techniques and is less expensive than sensors containing platinum.

Description

technical field [0001] Embodiments relate to resistance temperature detectors (RTDs), flow sensors and sensor systems. Embodiments also relate to semiconductor processing. Embodiments additionally relate to the use of magnetoresistive materials and Wheatstone bridges in RTDs. Background technique [0002] Measurement of fluid flow is important in manufacturing, medicine, environmental monitoring, and other fields. One type of flow sensor measures the rise in temperature of fluid flowing through the heater. Smaller temperature rises correspond to faster flows. Both gases and liquids are fluids and their flow rates can be measured by flow sensors including temperature sensors and heaters. [0003] RTDs are sensors made of materials such as platinum that exhibit a change in electrical resistance based on changes in temperature. Current technology provides systems and methods for fabricating RTDs and heaters on substrates using well-established semiconductor processing tech...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01F1/68G01F1/69
CPCG01F1/6845G01F1/692
Inventor W·T·基利安
Owner HONEYWELL INT INC
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