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Method and apparatus for inspecting magnetic head slider

一种检查方法、检查装置的技术,应用在磁头的功能测试、测量装置、通过光学手段进行材料分析等方向,能够解决工作效率不高、影响磁头滑块可靠性等问题,达到抑制影响的效果

Inactive Publication Date: 2008-01-09
SAE MAGNETICS (HK) LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0010] In the techniques described in Patent Documents 1 and 2, the magnetic head slider is cut out from the long bar, and it is necessary to install the cut magnetic head slider on the special support tool again, so the work efficiency is not high.
If adhesive is used when installing on the support tool, the adhesive may be directly attached to the head slider, so the reliability of the head slider may be affected.

Method used

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  • Method and apparatus for inspecting magnetic head slider
  • Method and apparatus for inspecting magnetic head slider
  • Method and apparatus for inspecting magnetic head slider

Examples

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Embodiment Construction

[0037] First, a magnetic head slider inspection device as one of the embodiments of the present invention will be described with reference to the accompanying drawings. FIG. 1 shows an overall configuration diagram of a magnetic head slider inspection device according to the present invention. The magnetic head slider inspection device 1 includes: a first platform 2, a second platform 3, and first to third cameras 11, 12, 13 with optical axes aligned with the inspection position T, displaying the first to third cameras 11, 12 , 13 image display device 14 of shooting information.

[0038] The first platform 2 has a bracket 21 as a support for the elongated bar B, and a base 22 supporting the bracket 21 . The bracket 21 is fixed on the base 22 by appropriate means, and can be separated from the base 22 . Both the bracket 21 and the base 22 are frame-shaped, and the bracket 21 is aligned with the frame of the base 22 and fixed. For this reason, in the state where the bracket 2...

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PUM

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Abstract

A method for inspecting a slider having a substantially rectangular parallelepiped shape is provided. The method has: a lifting step of lifting said slider upward and stopping said slider at an inspecting position while supporting said slider at an undersurface of said slider, wherein said undersurface is a surface that is other than a first surface, said first surface being an air bearing surface or a surface that is to be formed in said air bearing surface; and an inspection step of simultaneously inspecting said first surface and a second surface of said slider, said second surface being a surface that is other than said first surface and said undersurface, wherein said first surface is inspected by a first camera and said second surface is inspected by a second camera, said first and second cameras being arranged in advance such that an optical axis thereof passes through said inspecting position.

Description

technical field [0001] The invention relates to a method and device for inspecting a magnetic head slider, in particular to an optical inspection method and device for a magnetic head slider on a hard bracket. Background technique [0002] The formation method of the magnetic head slider is as follows: use thin film technology to form read and write elements on ceramic wafers such as A1203-TiC, and cut the wafer into long strips that form the opposite surface of the medium in a row in the length direction. Furthermore, the long bar is cut into individual magnetic head sliders. When the read / write elements are formed on the wafer, the number of each magnetic head slider is attached to the film formation surface, and the magnetic head slider is managed by this number after the wafer is cut out. After the head slider is cut from the wafer, it is subjected to multiple appearance inspections by optical microscopes and other devices in a strip state, a single state, and a state c...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G11B5/455G01N21/88
CPCG01N21/95692G01N21/9515G01N21/13
Inventor 藤井隆司
Owner SAE MAGNETICS (HK) LTD