Manufacturing method for variable shape mirror
A manufacturing method and technology of deformable mirrors, applied in optical recording/reproduction, optics, instruments, etc., can solve the problems of being unsuitable for mass production and low efficiency, and achieve the effect of being suitable for mass production and high-efficiency production
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[0020] Hereinafter, the present invention will be described in more detail with reference to the accompanying drawings. 1A and 1B are cross-sectional views of a deformable mirror manufactured according to a method for manufacturing a deformable mirror according to an embodiment of the present invention. Figure 1A shows the undriven state, while Figure 1B shows the driven state. 2 is an exploded perspective view of the deformable mirror to show the overall structure of the deformable mirror, and FIGS. 3A-3E are perspective views of the deformable mirror to show the process of the manufacturing method of the deformable mirror according to an embodiment of the present invention .
[0021] First, the deformable mirror 1 will be described. As shown in Fig. 1A and Fig. 2, the deformable mirror 1 in the present embodiment comprises: a supporting substrate 2, which is basically a square; Opposite; a plurality of piezoelectric elements 4 and a plurality of support columns 5 are sand...
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