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Piezoelectric element

A piezoelectric body and component technology, which is applied in electrical components, piezoelectric devices/electrostrictive devices, piezoelectric/electrostrictive/magnetostrictive devices, etc., and can solve problems such as the reduction of Curie temperature Tc

Inactive Publication Date: 2008-02-27
IBIDEN CO LTD +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

In addition, it was found that the conventional piezoelectric body has the following tendency. When the Curie temperature Tc is increased, the piezoelectric constant d will be reversed. 33 decrease, on the contrary, if the piezoelectric constant d is increased 33 , on the contrary the Curie temperature Tc decreases

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1-1～4 and comparative example 1-1、2

[0056] Use PbO for the Pb component and ZrO for the Zr component 2 , Ti component using TiO 2 , use SrO for the Sr component, and Nb for the Nb component 2 o 5 , The Zn component uses ZnO, weighs these components so as to satisfy the composition a~d after firing shown in Table 1 of Examples 1-1~4 and Comparative Examples 1-1, 2, add the mixture of each component and pure water Mix and pulverize in a ball mill for 20 hours, then dry. At this time, 65% of the total weight of pure water was applied. Also, the rotational speed of the ball mill was 500 rpm. Then, the mixture pulverized in a ball mill was dried at 100° C. for 24 hours to dehydrate, then calcined in air at 850° C. for 2 hours, and the calcined powder was pulverized by a ball mill for 20 hours. The average particle diameter after pulverization was 0.8 μm. To the obtained powder, polyvinyl alcohol was added as a binder in an amount of 0.5% by weight, and granulated so that the particle diameter was about 1.4 μm. ...

Embodiment 2-1～4 and comparative example 2-1、2

[0073] Weigh out PbO, ZrO 2 、TiO 2 , SrO, Nb 2 o 5 , ZnO so as to satisfy the compositions a to d shown in Examples 2-1 to 4 and Comparative Examples 2-1 and 2 in Table 2, a piezoelectric element was produced in the same manner as in Example 1 above. And, for each of these piezoelectric elements, (1) the piezoelectric constant d by the resonance method is obtained 33 , (2) The piezoelectric constant d based on the actual displacement 33 , (3) actual displacement ΔL2, (4) Curie temperature Tc, (5) piezoelectric constant change rate ΔD in the reliability test, the results are shown in Table 2 collectively.

[0074] Table 2

[0075]

[0076] In Examples 2-1 to 4 and Comparative Examples 2-1 and 2, the values ​​of a, c, and d were fixed, and only the value of b was changed. The results, as shown in Table 2, at 1.1×10 -2 ≤b≤6.0×10 -2 In the range of the piezoelectric constant d 33 , the actual displacement ΔL2, the Curie temperature Tc, and the rate of change of the pie...

Embodiment 3-1～6 and comparative example 3-1、2

[0078] Weigh out PbO, ZrO 2 、TiO 2 , SrO, Nb 2 o 5 , ZnO so as to satisfy the compositions a to d shown in Examples 3-1 to 6 and Comparative Examples 3-1 and 2 in Table 3, a piezoelectric element was produced in the same manner as in Example 1 above. And, for each of these piezoelectric elements, (1) the piezoelectric constant d by the resonance method is obtained 33 , (2) The piezoelectric constant d based on the actual displacement 33 , (3) Actual displacement ΔL2, (4) Curie temperature Tc, (5) Piezoelectric constant change rate ΔD in the reliability test, the results are shown in Table 3 collectively.

[0079] table 3

[0080]

[0081] In Examples 3-1 to 6 and Comparative Example 3-1, the values ​​of a and b were fixed, and the values ​​of c and d were changed. The results, as shown in Table 3, at 0.9×10 -2 ≤c≤4.25×10 -2 In the range of the piezoelectric constant d 33 , the actual displacement ΔL2, the Curie temperature Tc, and the rate of change of the piezoele...

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Abstract

A piezoelectric element which has a piezoelectric article produced by forming a mixture containing a Pb component, a Zr component, a Ti component, a Sr component, an Nb component and a Zn component, followed by firing, and an electrode arranged on at least one of the front and rear surfaces of the article, wherein relative amounts of respective components in the above piezoelectric article, when it is represented by the general formula Pb(ZraTi1-a )O3 + bSrO + cNbO2.5 + dZnO, satisfy, for example, a = 0.51, b = 2.0 x 10<-2>, c = 1.50 x 10<-2>, d = 1.50 x 10<-2>, c / d = 3.0.

Description

technical field [0001] The present invention relates to a piezoelectric element. Background technique [0002] The piezoelectric body is electrically polarized when a stress is applied, and deformed when an electric field is applied. The generation of electric polarization caused by stress and the generation of deformation caused by electric field are physical phenomena based on the same reason, and this phenomenon is called piezoelectric effect. Piezoelectric elements, in which electrodes are provided on both the front and back sides of the piezoelectric body, have been used in products such as quartz vibrators, electrometers, sensors, motors, automotive parts, and many other fields by utilizing the piezoelectric effect. Furthermore, as a representative piezoelectric body, lead zirconate titanate (PZT) having a perovskite crystal structure can be cited, and many piezoelectric bodies with various improvements based on this PZT have been reported. [0003] For example, in P...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L41/09C04B35/49H01L41/187H01L41/22H01L41/24C04B35/491H01L41/39
CPCH01L41/083C04B2235/80C04B2235/3251C04B2235/3213C04B35/491C04B2235/3284H01L41/187H10N30/50H10N30/853
Inventor 伊藤淳松野吉弥井户贵彦鹿野治英福安繁夫松山卓央
Owner IBIDEN CO LTD
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