A calibrated microelectromechanical microphone

一种话筒、话筒组件的技术，应用在电气元件、换能器电路、半导体静电换能器等方向，能够解决性能参数影响、成本低、很难消除影响等问题，达到紧凑配置、增加生产产量的效果
CN101155442AInactive Publication Date: 2008-04-02TDK CORPARATION
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
TDK CORPARATION
Publication Date
2008-04-02
Estimated Expiration
Not applicable · inactive patent

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Abstract

The invention relates to a calibrated microelectromechanical microphone. A MEMS microphone comprising a MEMS transducer having a back plate and a diaphragm as well as controllable bias voltage generator providing a DC bias voltage between the back plate and the diaphragm. The microphone also has an amplifier with a controllable gain, and a memory for storing information for determining a bias voltage to be provided by the bias voltage generator and the gain of the amplifier.
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Description

technical field

[0001] The present invention relates to calibrating microphones and in particular to microcomputer-based telephone microphones comprising a memory with calibration data for setting the electrical parameters of the microphone. Background technique

[0002] During normal operation, microelectromechanical ("MEMS") microphones are typically provided with a fixed DC bias between the diaphragm and the chassis structure. In EP 1599607A2 a specific operation of a DC bias for removing or reducing the electrostatic attraction between the diaphragm and the chassis is proposed and disclosed under microphone default conditions in combination with so-called diaphragm collapse.

[0003] US 2006 / 062406 A1 discloses a condenser microphone comprising a programmable DC bias for the microphone's condenser transducer and a memory for storing the DC bias setting. WO 01 / 78446A1 discloses an electret microphone comprising a variable sensitivity / variable gain circuit connected betwe...

Claims

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