X ray checking device
A technology for line inspection and generation of devices, applied in the direction of material analysis using radiation, etc.
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[0080] Hereinafter, embodiments of the present invention will be described using drawings. In addition, this invention is not limited to embodiment as demonstrated below, Various aspects can be included in the range which does not deviate from the summary of this invention.
[0081] (Embodiment 1)
[0082] figure 1 It is a block diagram showing the configuration of an X-ray inspection apparatus as an embodiment of the present invention. The X-ray inspection device 1 includes: an X-ray measurement optical system 13, including an X-ray generating device 11 and an X-ray detector 12; a field of view adjustment mechanism 14, which adjusts the measurement field of view of the object to be measured; and a control system 15, which controls the entire device. control.
[0083] The control system 15 includes a general-purpose computer device, and its hardware is further described modularly below: including a CPU 21, input devices 22 such as a keyboard and a mouse, display devices 23...
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