Disk-shaped substrate manufacturing method and washing apparatus

A manufacturing method and cleaning device technology, applied in the direction of cleaning methods using liquids, cleaning methods using tools, disc carrier manufacturing, etc., can solve problems such as difficult and uniform cleaning, differences in cleaning capabilities, and different contact states, and achieve stable cleaning , Good effect of removing particles
CN101266803AActive Publication Date: 2008-09-17RESONAC CORPORATION
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
RESONAC CORPORATION
Publication Date
2008-09-17

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Abstract

The invention provides a disk-shaped substrate manufacturing method and washing apparatus that can realize more steady washing and manufacture excellent disk-shaped substrate with less granule. The washing apparatus washes the disk-shaped substrate (10) surface at the same time supply washing liquid. The washing apparatus includes: a first porous roller (110a) and a second porous roller (110b) that have a cylindrical shape and can contact with a first surface and a second surface of a disk-shaped substrate (10) respectively; a shaft distance changing mechanism that the first porous roller (110a) and the second porous roller (110b) can move on changing shaft distance direction, namely, x direction, the shaft distance changing mechanism makes the first porous roller (110a) and the second porous roller (110b) stopping a pre-set shaft position, and contacting with the disk-shaped substrate (10).
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Description

technical field

[0001] This invention relates to the manufacturing method of the disk-shaped substrates, such as a glass substrate for magnetic recording media, etc., for example. Background technique

[0002] In recent years, the manufacture of disk-type substrates, which are disk-shaped substrates, has become active in response to an increase in demand for recording media. As a magnetic disk substrate which is one of such disk substrates, aluminum substrates and glass substrates are widely used. Such an aluminum substrate is characterized by high workability and low cost, and a glass substrate is characterized by excellent strength, surface smoothness, and flatness. In particular, recently, the demand for miniaturization and high density of disk substrates has been significantly increased, and attention has been paid to glass substrates that can achieve high density by reducing the surface roughness of the substrate.

[0003] With such a magnetic disk substrate, for exam...

Claims

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