Stocker for semiconductor substrate

A storage device and semiconductor technology, applied in storage device, semiconductor/solid-state device manufacturing, transportation and packaging, etc., can solve problems such as difficult air volume uniformity and equipment becoming too large.

Inactive Publication Date: 2012-07-04
MURATA MASCH LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0006] However, according to figure 2 The structure needs to add air ducts and air volume adjustment shutters, etc., which may cause the equipment to become too large
In addition, when the number of substrate racks 911 arranged in the vertical direction increases, it is difficult to uniformize the air volume over the entire area from the ceiling 201 to the floor 202 using only the air volume adjusting louvers 921

Method used

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  • Stocker for semiconductor substrate
  • Stocker for semiconductor substrate
  • Stocker for semiconductor substrate

Examples

Experimental program
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Embodiment Construction

[0032] Hereinafter, preferred embodiments of the present invention will be described with reference to the drawings. figure 1 Shown is the storage device 100 as one embodiment. figure 1 (a) and figure 1 (b) shows the internal structure of the storage device 100 , including a partial cross section of the storage device 100 . figure 1 The section of (b) is along figure 1 Section of line B-B in (a).

[0033] The storage device 100 is installed in a clean room constituting a semiconductor production line. In such a production line, for example, devices for performing various manufacturing processes on semiconductor substrates or devices for transferring substrates between the above devices are installed. The substrate is conveyed in a state where the substrate is accommodated in various containers. The storage device 100 is used to temporarily store the containers 120 for storing substrates in the production line described above.

[0034] The storage device 100 includes...

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PUM

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Abstract

This invention provides a memory device for semiconductor substrate, which is able to control the device scale and evenly guide the airflow to a substrate bracket. The space in the memory device (100) is limited by side plates (104, 105), a top deck (103) and the ground (202). The memory device is internally provided with a substrate bracket device (110) of a multi-layer substrate bracket (111) of a container (120) for loading the substrate. An air supply device (102) is mounted at the side plate (104) corresponding to the substrate bracket device (110). The component for blocking the airflowis mounted between the side plate (104) and the substrate bracket device (110) so as to insure the passage of the gas which flows in straight line path along an opening (110a) of the space between the air supply device (102) and the substrate bracket (111).

Description

technical field [0001] The present invention relates to a memory device for a semiconductor substrate provided with a substrate holder for loading a substrate or the like. Background technique [0002] In a factory or the like that manufactures semiconductor substrates, a storage device having a multi-layered substrate rack for storing the substrates or a container for storing the substrates is used in many cases. In such factories, manufacturing lines are often constructed in clean rooms and the manufacturing process is performed under clean air. In order to cleanly keep the substrates and the like stored in the storage device, for example, a device is provided to blow off dust and the like accumulated on the substrates and the like by blowing air between the substrate racks in the storage device. Patent Document 1 discloses a structure in which a reticle stored in a substrate rack is cleanly held by blowing clean air downward. [0003] However, as shown in Patent Documen...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01L21/677B65G1/04
CPCH01L21/67769
Inventor 前滝進伊藤浩士
Owner MURATA MASCH LTD
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