Optical apparatus and method for correcting coordinate

Abstract

The invention discloses a method for correcting coordinates of optical equipment, which is used for correcting and adjusting an orthogonal angular error between a scanning coordinate system and an inducting coordinate system so as to ensure that the orthogonal angular error returns to zero. The method of the invention includes that a correcting component is first prepared and two nonparallel correction straight lines are marked on the surface of the correcting component; the inducting coordinate system is then utilized for inducting the two correction straight lines to figure out two initial linear equations; the correcting component is next moved along the scanning direction of the scanning coordinate system so as to cause the two correction straight lines to move along the scanning direction at the same time; the inducting coordinate system is again utilized for inducting the two correction straight lines so as to figure out two correction linear equations; finally, the correction linear equations and the initial linear equations are used for figuring out the orthogonal angular error between the scanning coordinate system and the inducting coordinate system either of which is also adjusted to ensure that the orthogonal angular error returns to zero.

Description

technical field [0001] The present invention relates to an optical device and its coordinate correction method, in particular to a correction element marked with two non-parallel straight lines to normalize an orthogonal angle difference between a scanning coordinate system and a sensing coordinate system. Zero coordinate correction method. Background technique [0002] With the development and evolution of the times, many products have increasingly stringent requirements for processing dimensional accuracy, especially for optoelectronic or micro-electromechanical components, the accuracy must often meet the requirements of the nanometer level. However, in the entire processing process of photoelectric or micro-electromechanical components, it is often unavoidable that the workpiece to be processed must be transported to a specific processing position for processing operations, and it is even possible that the workpiece is still in motion. Perform specific processing operat...

AI Technical Summary

Problems solved by technology

First, the correction point P 1 with P 2 The connecting line must be parallel to the scanning direction I 0 ; Second, in order to allow the sensing range of the optical sensing module 13 to cover the calibration point P 1 with P 2 , it is bound to reduce the first induction direction axis X 0 ’ with the first scan direction axis X 0 The ratio between them is to reduce the sensing magnification. In this way, it is easy to cause higher resolution distortion and affect the accuracy of calibration. Third, compared to the second, if you want to maintain a high sensing magnification, you must reduce the sensing range. , it may cause one of the calibration points to fall outside the sensing range; Fourth, in the above method, due to the measurement of two data points, the sensing coordinate system Sec 0 , in the case of few sampling points, it will inevitably lead to high uncertainty of measurement (Uncertainty of Measurement)

[0011] Looking at the above, it can be seen that in the known technology, the line connecting the two calibration points must be parallel to the scanning direction, the resolution is not good, the sensing range is small, and the calibration reference target (that is, the second calibration point in the known embodiment) cannot be sensed at the same time. ), and the four main problems of high measurement uncertainty

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