Ploting device

Abstract

The invention provides a drawing device that avoids deviating or peeling a work-piece off from a work table caused by a cleaning roller being in contact with the work-piece when the cleaning roller contacts a surface of the work-piece on the work table. A plurality of suction holes formed on a surface of the drawing work table (13) undergoes suction by corresponding sucking bump (P) through a suction pipe (V). A pressure sensor (S) is used to detect vacuum degree inside the suction pipe. A drive motor (18) for the drawing work table is capable of enabling the drawing work table to reciprocate from a standby position to a position beyond a drawing position determined by the drawing optical system. A drive cylinder (43) for displacing a cleaning unit up and down enables the cleaning roller (49) to move up and down, relative to the drawing work table, between a mechanical arm (15) and a drawing optical system. a control member (6) uses the drive cylinder for displacing the cleaning unit up and down, to bring the cleaning roller down to be in contact with the drawing work table when the pressure sensor detects that the vacuum degree exceeds a specific value, and enables the drawing work table to move in the state.

Description

technical field [0001] The present invention relates to a direct exposure method in which a pattern is drawn and exposed on the surface of a flat substrate (workpiece) composed of a photosensitive material layer formed on the surface of an electronic circuit substrate, a glass substrate for a liquid crystal element, a glass element substrate for a PDP, etc. drawing device. Background technique [0002] Electronic circuit boards (printed circuit boards) are mounted on electronic devices such as mobile phones, various mobile electronic devices, and personal computers. However, as these electronic devices are miniaturized, the resolution of circuit patterns formed on the substrate , Connection surface (land) diameter, through-hole (via) diameter, and other requirements tend to be finely structured. [0003] In order to meet these demands, when using a conventional contact exposure apparatus, it is necessary to prepare a mask equal in size to the pre-drawing target pattern, and...

AI Technical Summary

Problems solved by technology

However, in the structure described in Patent Document 1, it is also necessary to press the workpiece against the workbench in such a manner that the entire workpiece is closely attached to the surface of the workbench by the frame, so that the workpiece contacts the workbench in a state without warpage or wrinkles, thereby Problems that cause the device to become larger and must rely on manual work by the operator

Moreover, if this operation is not carried out properly, the problem that the circuit pattern drawn on the part floating from the drawing workbench will become blurred will occur. In addition, the following problems will also arise: because all the suction ports The interior is connected, the air is never invaded by the suction port blocked by the workpiece, so the vacuum degree inside the suction port cannot be increased (the air pressure cannot be reduced), and sufficient adsorption force cannot be obtained, and the workpiece falls off the drawing table during the drawing process or position deviation

However, Patent Document 4 does not actively disclose the vacuum suction device as described above, so the relationship between the suction of the workpiece (substrate) by the table (first support portion) and the operation of the cleaning roller is not clear.

Therefore, there may be a problem that the insufficiently adsorbed workpiece (substrate) is peeled off from the table (first support portion) or its position is shifted due to the cleaning roller.

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