Aerosol-generting apparatus, film-forming apparatus, and aerosol-generating method
A technology for generating equipment and aerosols, which is applied in the direction of pressure inorganic powder coating, liquid injection devices, spray devices, etc., and can solve the problems of increasing the size of material particles, difficult material particles, maintaining constant, etc.
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no. 1 approach
[0083] figure 1 An example of a film forming apparatus equipped with the aerosol generating apparatus (aerosol generating section) according to the first embodiment of the present invention is schematically shown. exist figure 1 In (and in the first, second, third and fourth embodiments as described later), the interior of the holding container or container 5 and the film forming chamber 30 are shown.
[0084] Such as figure 1 As shown, a thin film forming apparatus 400 for the AD method includes an aerosol generating mechanism 100 for generating an aerosol E by mixing a carrier gas with material particles M contained in a powder 8, The aerosol E generated by the mechanism 100 is sprayed toward the substrate 20 to form a thin film forming mechanism (film forming part) 200 of the material particle M, and a control unit ( control part, controller) 300.
[0085] First, the aerosol generating mechanism 100 of the thin film forming apparatus 400 will be explained.
[0086] Suc...
no. 2 approach
[0129] image 3 The main components of an exemplary arrangement of an aerosol generating device according to a second embodiment of the invention are shown schematically.
[0130] In the aerosol generating device 301 of this embodiment, the flow channel member 40 and the through-hole member 4 of the aerosol generating device 101 of the first embodiment are changed as follows.
[0131] Such as image 3 As shown, a funnel-shaped (hopper-shaped) through-hole member 4A is provided in the housing container 5 to divide its inner space into two chambers. The upper space included in the inner space of the housing container 5 and partitioned by the through-hole member 4A serves as a powder housing chamber 9 to accommodate the powder 8 of the material particles M. The lower space is used as a carrier gas introduction chamber 10 to introduce the carrier gas into the powder containing chamber 9 .
[0132] The through hole member 4A has a large number of through holes (not shown). Powd...
no. 3 approach
[0142] Figure 4 The main components of an exemplary arrangement of an aerosol generating device according to a third embodiment of the invention are shown schematically. Compared with the flow channel member 40 of the aerosol generating device 101 of the first embodiment, the aerosol generating device 401 of this embodiment is different in that the flow channel member 60 thereof is changed as follows.
[0143] The flow channel member 60 of the aerosol generating device 401 constitutes a powder flow channel for conveying the powder 8 . In this embodiment, the flow channel member 60 is a cylindrical pipe made of resin, such as made of acrylic resin. Such as Figure 4 As shown, the flow channel member 60 has a substantially U-shaped form, which is arranged such that the flow channel member 60 protrudes from the inside to the outside of the housing container 5 in the horizontal direction. The flow channel member 60 has an upper intersecting portion 63 intersecting the inner wa...
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