Two-dimensional electricity driving displacement platform
An electric displacement and platform technology, which is applied in the direction of circuits, electrical components, conveyor objects, etc., can solve problems such as lack of reach, difficulty in large acceleration, and large quality
Inactive Publication Date: 2010-06-16
CHANGCHUN INST OF OPTICS FINE MECHANICS & PHYSICS CHINESE ACAD OF SCI
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Problems solved by technology
This two-dimensional electric displacement platform, when the Y-direction moving table reciprocates on the Y-guiding rail, the mass of the moving parts (including X-direction moving table, X-direction motor, X-direction driving rod, and Y-direction moving table) that outputs displacement Too large - the inertia is large, it is difficult to obtain high acceleration, and only the displacement requirement is realized. In optoelectronic instruments, especially microelectronic equipment, the speed requirements are particularly fast, and the platform of simple superposition and combination cannot achieve fast and efficient results
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[0010] like figure 1 As shown, the two-dimensional electric displacement platform in the prior art includes a base 1, a Y-direction motor 2, a Y-direction driving rod 3, a Y-direction moving table 4, an X-direction motor 5, an X-direction driving rod 6, and an X-direction moving table 7 ; The Y-direction motor 2 is fixed on the base 1, the Y-direction moving table 4 is placed on the Y-guiding rail of the base 1, and the Y-direction motor 2 is connected with the Y-direction moving table 4 through the Y-direction driving rod 3; the X-direction motor 5 It is fixedly connected with one end of the Y-direction moving table 4, the X-direction moving table 7 is placed on the X-guiding rail of the Y-direction moving table 4, and the X-direction motor 5 is connected with the X-direction moving table 7 through the X-direction driving rod 6 .
[0011] like figure 2 As shown, the two-dimensional electric displacement platform of the present invention includes a base 1, a Y-direction mot...
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The invention relates to a bidimensional electric displacement platform. A Y directional motor of the displacement platform is fixed on a base station. A Y directional moving machine is arranged on the Y directional lead rail of the base station; the Y directional motor is connected with the Y directional moving machine by a Y directional drive rod. An X directional moving platform is arranged onan X directional lead rail of the Y directional moving machine. An X directional motor is arranged on the base station. An X directional transition platform is arranged on the X directional lead railof the base station. The X directional motor is connected with the X directional transition platform by an X directional drive rod. A Y directional transition platform is arranged on the Y directionalguide lead rail of the X directional transition platform. One end of a link rod is fixedly connected with the X directional moving machine, and the other end is fixedly connected with the Y directional transition platform. The X directional motor of the invention is arranged on the base station, which ensures that the quality of moving parts is greatly reduced. The high acceleration is realized in the event that the driving moment of the motor is invariable, thus improving the displacement speed of the platform.
Description
technical field [0001] The invention relates to a two-dimensional electric displacement platform. Background technique [0002] Traditional two-dimensional electric displacement platform (see Figure 1 ) Including the base platform, Y-direction moving table, Y-direction motor, X-direction moving table, X-direction motor, X-direction platform and Y-direction platform usually adopt superposition combination, that is, the X-direction platform is added on the Y-direction platform, and the X-direction platform is added to the Y-direction platform, and the X-direction platform The motor is fixedly connected to one end of the Y-direction moving table. This two-dimensional electric displacement platform, when the Y-direction moving table reciprocates on the Y-guiding rail, the mass of the moving parts (including X-direction moving table, X-direction motor, X-direction driving rod, and Y-direction moving table) that outputs displacement Too large - the inertia is large, it is diffic...
Claims
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IPC IPC(8): H01L21/67H01L21/677H01L21/68H01L21/687
Inventor 宋志李树峰刘亚忠高跃红郑福志
Owner CHANGCHUN INST OF OPTICS FINE MECHANICS & PHYSICS CHINESE ACAD OF SCI