Grinding device and combination method thereof

Abstract

The invention relates to a grinding device and a combination method used for grinding a grinding piece. The grinding device comprises a fixing disk, at least one baffle, a positive pressure air cushion and a gasket. The fixing disk has a compression face and a load bearing face. The grinding gasket is fixed on the load bearing face. The baffle is arranged on the lateral side of the edge of the fixing disk. The positive pressure air cushion is arranged on the compression face and on the upper part of the baffle block, in order to press the compression face and drive the fixing disk and grinding gasket moving to the direction of the grinding piece. The gasket is arranged between the compression face and the positive pressure air cushion, and extends and covers to the baffle block part. The gasket is used for separating part of the positive pressure air cushion that extends outside the edge of the fixing disk, and therefore the situation that the edge of the fixing disk embedding to the positive pressure air cushion is avoided, and the damage probability of the positive pressure air cushion is reduced.

Description

technical field [0001] The invention relates to a grinding device and a combination method, in particular to a grinding device and a combination method for grinding a color filter. Background technique [0002] The manufacture of color filters is to coat different colored photoresists on the substrate, such as red, green and blue photoresists, to obtain specific wavelengths of light. After the photoresist has been processed to form a predetermined structure and arrangement, corner breaks and photoresist residues will be formed on the surface of the filter. The corner breaks and photoresist residues must be removed to maintain good optical characteristics of the color filter. The most commonly used method for reducing corner offset and removing photoresist residue is chemical mechanical polishing (CMP). The chemical mechanical polishing method selects a specific slurry (slurry) for the pre-polished material, and continuously adds the slurry during the grinding process of the...

AI Technical Summary

Problems solved by technology

Whenever this phenomenon occurs, it is necessary to stop the machine to replace the air cushion, resulting in a decrease in production capacity and an increase in cost

[0004] Therefore, how to avoid the problem of reduced production capacity and increased cost caused by the shutdown of the positive pressure air cushion due to damage and air leakage during the friction process is indeed an urgent issue for this related research and development field.

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