Large amplitude vibration active isolation lever

[0029] The technical solutions of the present invention will be described in detail below through specific embodiments.

[0030] In this embodiment, the large-amplitude vibration active isolation rod includes three parts: a mover 1 , a stator 2 and a position sensor 3 . The mover 1 consists of an inner support cylinder 4, a linear guide slider 7, a linear guide 8, and a motor mover 9; the stator 2 consists of a dust cover 5, a guide rail fixing plate 6, a motor stator 10, an outer support cylinder 11, and a positioning screw 14 and the top positioning block 15; the position sensor 3 is composed of a grating fixing plate 13 and a grating sensor 12. The mover 1 is on the top, the stator 2 is on the bottom, the mover 1 moves up and down relative to the stator 2, cancels the vibration transmitted by the stator 2, and keeps the mover 1 stable. The position sensor 3 is fixed on the stator 2 to detect the stroke of the mover 1. .

[0031] The assembly process of this embodiment is to first connect the motor mover 9 with the inner support cylinder 4, install the linear guide slider 7 and the linear guide rail 8 on the three sides of the inner support cylinder 4, and complete the assembly of the mover 1; Install the top positioning block 15 on the top of the motor stator 10, then connect the bottom of the motor stator 10 to the outer support cylinder 11, then fix the top positioning block 15 with four positioning screws 14, and connect the three guide rail fixing plates 6 to the outer support cylinder. 11 is connected to complete the assembly of stator 2; next, put the assembled mover 1 into the stator 2, and after adjusting the concentricity, fix the linear guide slider 7 of the mover 1 part and the guide rail fixing plate of the stator 2 part 6. Make the mover 1 move relative to the stator 2 in the direction of the guide rail; finally connect the grating sensor 3 to the grating fixing plate 13, and then fix the grating fixing plate 13 to the outer support cylinder 11, and cover the top of the outer support cylinder 11. Dust cover 5, complete all assembly.

[0032] Among them, the motor mover (9) and the motor stator (10) are cylindrical linear motor components produced by the German BOB company, the model is DTL85/103. The continuous output force of the cylindrical linear motor at 20 degrees Celsius is 142N, with a peak value of 142N. The output force is 217N and the total stroke is 55mm. The guide rail slider (7) and the guide rail (8) are produced by Japanese THK Company, and the models are SRS15MUU and 110LM. The grating sensor (12) is RGH22 of British Renishow Company, the maximum measurement speed is 10m/s, and the measurement accuracy is 500nm.

[0033] The inner support cylinder (4), the dust cover (5), the outer support cylinder (11) and the top positioning block (15) are made of hard aluminum alloy, and the guide rail fixing plate (6) and the grating fixing plate (13) are used The material is steel. The surface treatment process used for hard aluminum alloy parts is surface anodizing, and the surface treatment process used for steel parts is chrome plating.

[0034] After the assembly is completed, the total height of the large-amplitude vibration active isolation rod is 255mm, the diameter of the circumscribed circle is 135mm, and the total mass is 5.7kg. The maximum bearing weight is 8kg, the maximum vibration active isolation amplitude is 25mm, and the maximum vibration active isolation frequency is above 50Hz.