Drainage equipment of phosphorus waste liquid from phosphorus oxytrichloride process and use method thereof

Abstract

The invention discloses a discharge device for a process phosphorus waste liquid of phosphorus oxychloride, which comprises a quartz collector, a phosphorus waste liquid discharge pipeline, a power acid discharge pipeline, a first hand valve, a second hand valve, a water supply pipeline, and a power hand valve, wherein one end of the phosphorus waste liquid discharge pipeline is connected with the quartz collector, while the other end is connected with the power acid discharge pipeline; the first hand valve is arranged on the phosphorus waste liquid discharge pipeline and is used for controlling the discharge of a phosphorus waste liquid; the second hand valve is arranged on the phosphorus waste liquid discharge pipeline at the lower end of the first hand valve and is used for controllingthe discharge of the phosphorus waste liquid and water as well as the storage of the water in the quartz collector; the water supply pipeline is arranged at one side of the phosphorus waste liquid discharge pipeline and is communicated with the phosphorus waste liquid discharge pipeline between the first hand valve and the second hand valve; and the power hand valve is arranged on the water supply pipeline and is used for power water supply. The invention also discloses a method for using the discharge device. The discharge device for the process phosphorus waste liquid of the phosphorus oxychloride can effectively prevent the fault of blocking the discharge pipes due to the crystallization of the phosphorus waste liquid.

Description

technical field [0001] The invention relates to the treatment of phosphorus oxychloride (POCL3) process phosphorus waste liquid, in particular to a discharge device for phosphorus oxychloride process phosphorus waste liquid and a use method thereof. Background technique [0002] At present, the discharge device of phosphorus waste liquid is as follows: figure 1 As shown, the bottom of the quartz collector (TRAP) is connected with a phosphorus waste liquid discharge pipe, and the phosphorus waste liquid discharge pipe is connected with the power acid discharge pipe at one end away from the quartz collector, and the phosphorus waste liquid discharge pipe is provided with One-hand valve for controlling discharge of phosphorus waste liquid. [0003] In the manufacture of semiconductor integrated circuits, the phosphorus oxychloride (POCL3) process reaction equation is as follows: [0004] Step 1: 4POCL3+3O2->6CL2+2P2O5; [0005] Step 2: P2O5+SiO2->P2O5-SiO2 (PSG phospho...

AI Technical Summary

Problems solved by technology

[0007] CL2, P2O5 combine with water vapor to generate a mixture of hydrochloric acid and phosphoric acid (phosphorus waste liquid), and the phosphorus waste liquid mixture passes through the existing discharge device (see figure 1 ) discharge, it is easy to accumulate in the quartz collector and the discharge pipe of phosphorus waste liquid, and form crystals in the discharge pipe of phosphorus waste liquid and power acid discharge pipe, and then block the discharge of phosphorus waste liquid

In order to keep the discharge of phosphorus waste liquid unimpeded, maintenance personnel often need to remove the quartz collector and phosphorus waste liquid discharge pipe to remove crystals, which not only increases the maintenance time of the equipment, but also increases the exchange frequency of quartz collector parts

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