Axial magnetic flux electromagnetic type micro driver based on double layer planar coil

Abstract

The invention relates to an axial magnetic flux electromagnetic micro driver based on a double-layer planar coil, which belongs to the micro electronmechanical technology field. The axial magnetic flux electromagnetic micro driver comprises a double-sided magnetic steel rotor, double-layer planar coil stators, single-sided magnetic steel rotors, a bearing and an output shaft, wherein, the double-sided magnetic steel rotor is positioned at the axial central position of the output shaft and is fixedly connected with the output shaft; the two double-layer planar coil stators are positioned at the two sides of the double-sided magnetic steel rotor and are connected with the output shaft through the bearing; and the two single-sided magnetic steel rotors are positioned at the outer sides of the two double-layer planar coil stators, and the magnetic steels are opposite to the windings of the double-layer planar coil stators and are fixedly connected with the output shaft. The invention reduces the dummy coils required for connection for the internal cause of the single-layer planar coil, reduces the power consumption of the micro driver within the unit volume and improves the output moment. In addition, the invention can realize the high-efficiency micro driver within the microsize, has simple structure, is easy to realize and is particularly suitable for realizing the high-efficiency electromagnetic micro driver under the condition of limitation of the microsize.

Description

technical field [0001] The invention relates to an axial magnetic flux electromagnetic micro-driver in the field of micro-electromechanical technology, in particular to an axial magnetic flux electromagnetic micro-driver based on a double-layer planar coil. Background technique [0002] Electromagnetic micro-actuators are generally divided into axial flux and radial flux structures. The coil structure of the radial magnetic flux structure is easy to realize, and the radial size is small, but the price of this structure to achieve a large output torque is that the axial size is very large, which is more than several times the radial size (the radial size is in the millimeter scale, while the shaft Dimensions are on the centimeter scale), which is difficult to apply inside microsystems. At the same time, the stator coils of the radial magnetic flux structure are distributed in the circumference, which is not conducive to the realization of the current microfabrication process...

AI Technical Summary

Problems solved by technology

This single-layer planar coil structure not only reduces the output power per unit volume, but also heats up the micro-drive more seriously, which affects the efficiency and life of the micro-drive.

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