Takeup type vacuum filming apparatus

Abstract

Intended is to simplify the constitution of and improve the assemblage of an oil condensing roller, while suppressing the reductions of a condensation adhesion efficiency of oil and a transfer efficiency of the oil to a printing roller. Provided is a takeup type vacuum filming apparatus comprising a mask forming unit (20), which includes an oil condensing roller (31) for holding such oil on its outer circumference as to form a mask pattern (25), a printing roller (33) for transferring the oil as the mask pattern (25) to the filming face of a film (12), and a transfer roller (32) arranged between the oil condensing roller (31) and the printing roller (33) for transferring the oil from the coil condensing roller (31) to the printing roller (33). Further comprises are a cooling mechanism forcooling the oil condensing roller (31), and a rocking mechanism for rocking the transfer roller periodically in the axial direction with respect to the oil condensing roller (31) and the printing roller (33).

Description

technical field [0001] The present invention relates to a roll-to-roll vacuum film forming apparatus preferably suitable for, for example, the manufacture of thin film capacitors. Background technique [0002] Conventionally, in the manufacture of film capacitors, an insulating film such as a plastic film is unwound from an unwinding roll, and a metal film is vapor-deposited on one surface of the film, and the film is wound up on a winding roll. roll-to-roll vacuum evaporation device. [0003] However, in this type of film capacitor, there is a so-called self-protection function type in which the deposited metal film formed on the surface of the film is divided into a plurality of capacitor pieces, and the adjacent capacitor pieces are connected to each other at a narrow connection portion made of the same deposited film. the capacitor. In this type of film capacitor, when a breakdown occurs locally, the above-mentioned connecting portion is fused (fuse function), thereby ...

AI Technical Summary

Problems solved by technology

[0008] But when Image 6 In the roll-to-roll vacuum evaporation device with the conventional mask forming unit of the structure shown, the ink condensation roller C has a forced cooling mechanism and a swing mechanism, so the structure of the ink condensation roller C is complicated and the assembly work is cumbersome.

In addition, since cooling water needs to be circulated and supplied to the movable part under vacuum, there is a problem that a special connection structure is required and the cost of the device increases.

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