Substrate inspecting apparatus

Abstract

Provided is a substrate inspecting apparatus, which can be easily transported by a vehicle even when a substrate is increased in size, is easily assembled at a transported site, and reduces transportation cost. The substrate inspecting apparatus is provided with an inspection head for inspecting an inspection line orthogonally intersecting with a substrate transfer direction; an inspection unit wherein an inspection floating stage section for floating a gantry for supporting the inspection head and the substrate to a fixed height is integrated with an inspection base; and a transfer unit, which is removably assembled to the inspection base between the leg section of the gantry and the inspection floating stage section, is arranged along one side end of a transfer path for transferring the substrate, in T-shape to the inspection unit, and holds the substrate to shift it in a transfer direction. The substrate inspecting apparatus can be transported by a vehicle by being disassembled into the transfer unit and the inspection unit.

Description

technical field [0001] The present invention relates to a substrate inspection device for inspecting a thin substrate such as a glass substrate. Background technique [0002] Conventionally, there is known a substrate inspection apparatus for large-sized glass substrates used in flat panel displays (FPDs) produced by a photolithography process line. In the state, the glass substrate is conveyed along the conveying direction, and the defect on the surface of the glass substrate is inspected by the inspection head mounted on the frame set across the floating table. In such a substrate inspection device, the following parts are integrally assembled on a solid inspection base: a float table that floats a glass substrate; and a substrate transfer mechanism that holds the floated glass substrate and forcibly transfers the substrate in the transfer direction. ; and a door-shaped frame that is provided with an inspection head and can move the inspection head in a direction perpendi...

AI Technical Summary

Problems solved by technology

[0008] However, in the substrate inspection device disclosed in Patent Document 1, a suction cup array equipped with vacuum nozzles and an air chuck are installed on a granite base, and the glass substrate is floated by pressurized air during the conveyance of the glass substrate. In the process of fixing with vacuum gas, it is necessary to repeat the actions of absorbing / floating the glass substrate every inspection, and it is difficult to shorten the inspection time

In addition, since the two Y-axis linear servo motor units are arranged across the frame sub-unit, when the glass substrate is handed over during the inspection process, the glass substrate may deviate, or the front and rear ends of the glass substrate may be held by suction. part, so that the glass substrate may rotate around the suction holding part

In particular, when conveying in the direction of pressing the glass substrate, the center of gravity of the glass substrate tends to move, and the conveying posture of the glass substrate is unstable.

[0009] In addition, it is difficult to integrate the 2 Y-axis motors due to the fact that the frame subassembly is split from the central steel frame, and then the 2 Y-axis linear servo motor assemblies are split from the upper and lower steel frames to be assembled on site. The reference axis (Y axis) of the linear servo motor assembly is aligned at right angles to the reference axis (X axis) of the frame subassembly

That is, when the steel frame divided into three parts is integrated by welding, if the installation positions of the frame subassembly and the two Y-axis linear servo motor assemblies deviate, the positions of the two Y-axis linear servo motor assemblies must be adjusted on site. Straightness and squareness of each Y-axis linear servo motor assembly relative to the frame subassembly, making assembly very cumbersome

Moreover, since the two Y-axis linear servo motor assemblies are arranged across the frame subassembly, it is necessary to simultaneously adjust the right angle of each Y-axis linear servo motor assembly relative to the frame subassembly and the two Y-axis linear servo motor assemblies. The straightness of the two, and the position alignment of the three steel frames is also required, so the problem of on-site adjustment work is very complicated.

Images